UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film

UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film

ZnO film was deposited by the magnetron sputtering method. The thickness of ZnO film is approximately 2 μm. The influence of UV light illumination on C2H5OH sensing properties of ZnO film was investigated. Gas sensing results revealed that the UV-illuminated ZnO film displays excellent C2H5OH charac...

Full description

Bibliographic Details
Main Authors:	Jinyu Huang, Yu Du, Quan Wang, Hao Zhang, Youfu Geng, Xuejin Li, Xiaoqing Tian
Format:	Article
Language:	English
Published:	MDPI AG 2017-12-01
Series:	Sensors
Subjects:	ZnO film UV illumination magnetron sputtering ethanol sensing properties
Online Access:	https://www.mdpi.com/1424-8220/18/1/50

Similar Items

Surface Properties of Nanostructured, Porous ZnO Thin Films Prepared by Direct Current Reactive Magnetron Sputtering
by: Monika Kwoka, et al.
Published: (2018-01-01)

Study on Fabrication of ZnO Waveguide Layer for Love Wave Humidity Sensor Based on Magnetron Sputtering
by: Changbao Wen, et al.
Published: (2018-10-01)

Deposition of Al-doped ZnO films by high power impulse magnetron sputtering
by: Mickan, Martin
Published: (2017)

Correlation between luminescent properties and growth conditions for ZnO films grown on Si(100) by sputtering technique
by: Sanghun Jeong, et al.
Published: (2011-09-01)

Effect of Silver Dopants on the ZnO Thin Films Prepared by a Radio Frequency Magnetron Co-Sputtering System
by: Fang-Cheng Liu, et al.
Published: (2017-07-01)

Resistive Switching Characteristics of Li-Doped ZnO Thin Films Based on Magnetron Sputtering
by: Xiaofeng Zhao, et al.
Published: (2019-04-01)

Structure, optical and electrical properties of Nb-doped ZnO transparent conductive thin films prepared by co-sputtering method
by: Yantao Liu, et al.
Published: (2019-12-01)

Processing and Study of Optical and Electrical Properties of (Mg, Al) Co-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering for Photovoltaic Application
by: Chayma Abed, et al.
Published: (2020-05-01)

ZnO Thin Films Growth Optimization for Piezoelectric Application
by: Vincent Polewczyk, et al.
Published: (2021-09-01)

ZnO Nanostructures Prepared by RF Sputtering
by: Sona Flickyngerova, et al.
Published: (2006-01-01)

Comparative Study of ZnO Thin Films Grown on Quartz Glass and Sapphire (001) Substrates by Means of Magnetron Sputtering and High-Temperature Annealing
by: Weijia Yang, et al.
Published: (2019-10-01)

PHYSICAL PROPERTIES OF InN PARTICLES OBTAINED BY RF MAGNETRON SPUTTERING
by: Roberto Bernal Correa, et al.
Published: (2014-01-01)

Measurement setup for High Power Impulse Magnetron Sputtering
by: Sveinsson, Ólafur Björgvin
Published: (2011)

The structural and electrical properties of nanostructures ZnO thin films on flexible substrate
by: Herman, S.H, et al.
Published: (2017)

Fabrication and Characterization of Aluminum Nitride Nanoparticles by RF Magnetron Sputtering and Inert Gas Condensation Technique
by: Ishaq Musa, et al.
Published: (2020-04-01)

SYSTEM OF STABILIZATION OF REACTIVE MAGNETRON SPUTTERING PROCESS
by: A. P. Burmakou, et al.
Published: (2018-06-01)

CLEANING AND SPUTTERING USING PLANAR ACOUSTOPLASMA MAGNETRON
by: A.S. Abrahamyan, et al.
Published: (2018-03-01)

Fabrication and Characterization of High-Quality UV Photodetectors Based ZnO Nanorods Using Traditional and Modified Chemical Bath Deposition Methods
by: Ahmed Fattah Abdulrahman, et al.
Published: (2021-03-01)

RF/DC Magnetron Sputtering Deposition of Thin Layers for Solar Cell Fabrication
by: Slawomir Gulkowski, et al.
Published: (2020-08-01)

RF Magnetron Sputtering Coating Of Hydroxyapatite On Alkali Solution Treated Titanate Nanorods
by: Lee K., et al.
Published: (2015-06-01)

Review of GaN Thin Film and Nanorod Growth Using Magnetron Sputter Epitaxy
by: Aditya Prabaswara, et al.
Published: (2020-04-01)

Properties and Characterisation of Sputtered ZnO
by: Schuler, Leo Pius
Published: (2008)

Sputtering pressure influenced structural, electrical and optical properties of RF magnetron sputtered MoO3 films
by: Subbarayudu S., et al.
Published: (2020-03-01)

Feasible Route for a Large Area Few-Layer MoS2 with Magnetron Sputtering
by: Wei Zhong, et al.
Published: (2018-08-01)

Structural and Tribological Aspects on Ti (C,O,N) Magnetron Reactive Sputtered Thin-Films
by: Daniel MUNTEANU, et al.
Published: (2007-11-01)

Effects of ZnO crystal facet on the ethanol detection by the Au/ZnO sensors
by: Fubo Gu, et al.
Published: (2021-12-01)

Effects of Thermal Annealing on the Properties of Zirconium-Doped Mg<sub>x</sub>Zn<sub>1−X</sub>O Films Obtained through Radio-Frequency Magnetron Sputtering
by: Wen-Yen Lin, et al.
Published: (2021-05-01)

Characterisation of Silver Deposited Coir Fibers by Magnetron Sputtering
by: Melvi Chandy, et al.
Published: (2015-04-01)

Electrochemical Corrosion of Nano-Structured Magnetron-Sputtered Coatings
by: Sebastian Calderon, et al.
Published: (2019-10-01)

Microstructure, chemistry and optical properties in ZnO and ZnO-Au nanocomposite thin films grown by DC-reactive magnetron co-sputtering
by: Chamorro Coral, William
Published: (2014)

Electrochromic Properties of Li- Doped NiO Films Prepared by RF Magnetron Sputtering
by: Jui-Yang Chang, et al.
Published: (2020-01-01)

Characteristics of Carrier Transport and Crystallographic Orientation Distribution of Transparent Conductive Al-Doped ZnO Polycrystalline Films Deposited by Radio-Frequency, Direct-Current, and Radio-Frequency-Superimposed Direct-Current Magnetron Sputtering
by: Junichi Nomoto, et al.
Published: (2017-08-01)

Synthesis, Microstructural, and Mechano-Tribological Properties of Self-Lubricating W-S-C(H) Thin Films Deposited by Different RF Magnetron Sputtering Procedures
by: Todor Vuchkov, et al.
Published: (2020-03-01)

Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation
by: Miriam Yuste, et al.
Published: (2019-03-01)

Adjusting the Energy Bands of WO<sub>3</sub>@ZnO Nanocomposite Heterojunction Through the Combination of WO<sub>3</sub> Thin Film to Improve its Photoelectric Performance
by: Yan Xu, et al.
Published: (2020-01-01)

Effects of Bottom Layer Sputtering Pressures and Annealing Temperatures on the Microstructures, Electrical and Optical Properties of Mo Bilayer Films Deposited by RF/DC Magnetron Sputtering
by: Haili Zhao, et al.
Published: (2019-04-01)

Physical properties of nanostructured ZnO thin films deposited by DC magnetron sputtering method with different volume of O2 in carrier gas
by: Asgary Somayeh, et al.
Published: (2019-01-01)

Propriedades supercondutoras de filmes finos de Nb depositados por magnetron sputtering
by: ROLIM, Ana Luiza de Souza
Published: (2014)

Effect of Substrate Biasing on the Epitaxial Growth and Structural Properties of RF Magnetron Sputtered Germanium Buffer Layer on Silicon
by: Gui-Sheng Zeng, et al.
Published: (2021-09-01)

Mécanisme de sélection de l'orientation préférentielle lors de la croissance de couches minces, application au dépôt d'oxyde de zinc par pulvérisation magnétron à impulsions de haute puissance
by: Lejars, Antoine
Published: (2012)