Modeling and Analysis of a Closed-Loop System for High-Q MEMS Accelerometer Sensor
High-Q sensing element is desirable for high performance while makes the loop control a great challenge. This paper presents a closed-loop system for high-Q capacitive MEMS accelerometer which has achieved loop control effectively. The proportional-derivative(PD)control is developed in the system to...
Main Authors: | Wang Yalin, Yang Yongjun |
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Format: | Article |
Language: | English |
Published: |
EDP Sciences
2018-01-01
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Series: | MATEC Web of Conferences |
Online Access: | https://doi.org/10.1051/matecconf/201816005008 |
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