Prototype of the particle fluence measurement device
A method of measuring particle fluence and ion beam current in experiments of ion implantation is presented. The design and technical details of a realized prototype device are discussed. Special care is devoted to the effect of secondary electrons and its elimination. An electrostatic solution w...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
VINCA Institute of Nuclear Sciences
2012-01-01
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| Series: | Nuclear Technology and Radiation Protection |
| Subjects: | |
| Online Access: | http://www.doiserbia.nb.rs/img/doi/1451-3994/2012/1451-39941204404T.pdf |