Technology roadmap for development of SiC sensors at plasma processes laboratory
Recognizing the need to consolidate the research and development (R&D) activities in microelectronics fields in a strategic manner, the Plasma Processes Laboratory of the Technological Institute of Aeronautics (LPP-ITA) has established a technology roadmap to serve as a guide for activities rela...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Departamento de Ciência e Tecnologia Aeroespacial
2010-08-01
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| Series: | Journal of Aerospace Technology and Management |
| Subjects: | |
| Online Access: | http://www.jatm.com.br/papers/vol2_n2/JATMv2n2_p219-224_Technology_roadmap_for_development_of_SiC_sensors_at_plasma_processes_laboratory.pdf |