Kinetics of Formation and Growth of Microdefects in Crystals
In the review, the main results of numerous direct observations of microdefects’ formation (oxygen precipitates and dislocation loops) in a silicon crystal during its growth and heat treatments are described. Thermodynamic conceptions concerning formation of new-phase particles in the supersaturated...
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| Format: | Article |
| Language: | English |
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G. V. Kurdyumov Institute for Metal Physics of the N.A.S. of Ukraine
2006-09-01
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| Series: | Успехи физики металлов |
| Online Access: | https://doi.org/10.15407/ufm.07.03.135 |
| Summary: | In the review, the main results of numerous direct observations of microdefects’ formation (oxygen precipitates and dislocation loops) in a silicon crystal during its growth and heat treatments are described. Thermodynamic conceptions concerning formation of new-phase particles in the supersaturated solid solution of oxygen in silicon are briefly presented. Classical approaches to the description of oxygen-precipitation kinetics are represented too. Modern models of kinetics of growth and decomposition of precipitates and dislocation loops in silicon are described. |
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| ISSN: | 1608-1021 2617-0795 |