Dielectric properties of amorphous Zr–Al–O and Zr-Si-O thin films
We have systematically studied the composition dependence of the dielectric properties of Zr1-xAlxO2-x/2 and Zr1-xSixO2. An essentially linear variation of the static dielectric constant, εs, was observed as a function of composition, x, for compositions rich in the p-block element, i.e., x > 0.4...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
World Scientific Publishing
2015-03-01
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| Series: | Journal of Advanced Dielectrics |
| Subjects: | |
| Online Access: | http://www.worldscientific.com/doi/pdf/10.1142/S2010135X15500101 |