Effects of substrate properties and sputtering methods on self-formation of Ag particles on the Ag–Mo(Zr) alloy films
This article studies two different sputtering methods for depositing Ag–Mo and Ag–Zr alloy films on single crystal silicon (Si), flexible polyimide (PI) and soda-lime glass substrates. The phase structure and the surface morphology of the Ag–Mo(Zr) alloy films were characterized by XRD, SEM and EDS....
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2020-10-01
|
| Series: | Nanotechnology Reviews |
| Subjects: | |
| Online Access: | https://doi.org/10.1515/ntrev-2020-0077 |