| Summary: | Films fabricated by aerosol deposition (AD) can be coated through interactions between the particles and substrate. Accelerated particles collide with the substrate, generating impact energy at the contact point. These interactions depend on the hardness of the substrate. This study examined the effects of the hardness of the substrate on the deposition behavior of thick glass films by AD. Substrates with different hardness, Al2O3, glass, and STS304, were used, and the film formation behavior was observed. The coating thickness of the initial layer was inversely proportional to the hardness of the substrate. The STS304 substrate exhibited a phase transition after the coating process that was induced by the strong impact energy. The film formation mechanism depending on the substrate hardness was proposed based on the microstructure of the interface between the film and substrate.
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