Modeling Support Loss in Torsional Mode Vibrations of a Micromechanical Disk Resonator with Two L-Shaped Support Beams
In this paper, a new micromechanical disc resonator with two L-shaped horizontal support beams in torsional mode vibrations has been proposed. The proposed micromechanical resonator has been studied in the field of natural frequencies and support loss. In order to verify the findings of natural freq...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
D. G. Pylarinos
2017-02-01
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| Series: | Engineering, Technology & Applied Science Research |
| Subjects: | |
| Online Access: | http://etasr.com/index.php/ETASR/article/download/984/443 |