JFET Integration Using a Foundry SOI Photonics Platform

• Main Authors: Shuxia Li, N. Garry Tarr, Winnie N. Ye
• Format: Article
• Language: English
• Published: MDPI AG 2019-09-01
• Series: Applied Sciences
• Subjects: silicon photonics; junction field-effect transistor (JFET); optoelectronics integration
• Online Access: https://www.mdpi.com/2076-3417/9/19/3964

We explore the monolithic integration of conventional electronics with SOI photonics using the commercial silicon photonics foundry technology offered by A*STAR’s Institute of Microelectronics (IME). This process offers optical waveguide modulators and photodetectors, but was not intended to support transistors. We present the implementation of junction field effect transistors (JFETs) integrated with optical waveguides and photodetectors. A simple SPICE model is developed for the JFETs based on the available ion implant parameters, and the geometry feature size allowed by the technology’s layout rules. We have demonstrated the monolithic integration of photonics and electronics circuits. This work could be useful for application in waveguide sensors and optical telecommunications.