Equilibrium current density balancing two atomic flows in coupled problems of electromigration and thermomigration in unpassivated gold film
This work studies the coupled problems of electromigration (EM)- and thermomigration (TM)-induced anomalous atomic flows through experiments for demonstrating EM and TM tests and the theoretical formulation describing the atomic behavior. A two-dimensional unpassivated Au interconnect, having a prot...
Main Authors: | Yasuhiro Kimura, Yang Ju |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2020-08-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/5.0011417 |
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