Equilibrium current density balancing two atomic flows in coupled problems of electromigration and thermomigration in unpassivated gold film

This work studies the coupled problems of electromigration (EM)- and thermomigration (TM)-induced anomalous atomic flows through experiments for demonstrating EM and TM tests and the theoretical formulation describing the atomic behavior. A two-dimensional unpassivated Au interconnect, having a prot...

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Bibliographic Details
Main Authors: Yasuhiro Kimura, Yang Ju
Format: Article
Language:English
Published: AIP Publishing LLC 2020-08-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/5.0011417

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