Graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layers
Recently, relevant advances on graphene as a building block of integrated circuits (ICs) have been demonstrated. Graphene growth and device fabrication related processing has been steadily and intensively powered due to commercial interest; however, there are many challenges associated with the inco...
Main Authors: | , , |
---|---|
Format: | Article |
Language: | English |
Published: |
De Gruyter
2014-01-01
|
Series: | Nanofabrication |
Subjects: | |
Online Access: | http://www.degruyter.com/view/j/nanofab.2014.1.issue-1/nanofab-2014-0001/nanofab-2014-0001.xml?format=INT |
id |
doaj-60cc883deedb4467b60f02c9d4d7e38b |
---|---|
record_format |
Article |
spelling |
doaj-60cc883deedb4467b60f02c9d4d7e38b2020-11-25T00:55:35ZengDe GruyterNanofabrication2299-680X2014-01-011110.2478/nanofab-2014-0001nanofab-2014-0001Graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layersRius Gemma0Perez-Murano Francesc1Yoshimura Masamichi2Nagoya Institute of Technology, NITech, Gokiso, Showa, 466-8555 Nagoya, JapanInstitut de Microelectronica de Barcelona, IMB-CNM-CSIC, Campus UAB, 08193, Bellaterra, SpainToyota Technological Institute, TTI, 2-12-1 Hisakata, Tempaku, 468-8511, Nagoya, JapanRecently, relevant advances on graphene as a building block of integrated circuits (ICs) have been demonstrated. Graphene growth and device fabrication related processing has been steadily and intensively powered due to commercial interest; however, there are many challenges associated with the incorporation of graphene into commercial applications which includes challenges associated with the synthesis of this material. Specifically, the controlled deposition of single layer large single crystal graphene on arbitrary supports, is particularly challenging. Previously, we have reported the first demonstration of the transformation of focused ion beam induced deposition of carbon (FIBID-C) into patterned graphitic layers by metal-assisted thermal treatment (Ni foils). In this present work, we continue exploiting the FIBID-C approach as a route for graphene deposition. Here, thin patterned Fe layers are used for the catalysis of graphenization and graphitization. We demonstrate the formation of high quality single and few layer graphene, which evidences, the possibility of using Fe as a catalyst for graphene deposition. The mechanism is understood as the minute precipitation of atomic carbon after supersaturation of some iron carbides formed under a high temperature treatment. As a consequence of the complete wetting of FIBID-C and patterned Fe layers, which enable graphene growth, the as-deposited patterns do not preserve their original shape after the thermal treatmenthttp://www.degruyter.com/view/j/nanofab.2014.1.issue-1/nanofab-2014-0001/nanofab-2014-0001.xml?format=INTgrapheneFIBIDiron catalystthermal treatmentcrystallization |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Rius Gemma Perez-Murano Francesc Yoshimura Masamichi |
spellingShingle |
Rius Gemma Perez-Murano Francesc Yoshimura Masamichi Graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layers Nanofabrication graphene FIBID iron catalyst thermal treatment crystallization |
author_facet |
Rius Gemma Perez-Murano Francesc Yoshimura Masamichi |
author_sort |
Rius Gemma |
title |
Graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layers |
title_short |
Graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layers |
title_full |
Graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layers |
title_fullStr |
Graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layers |
title_full_unstemmed |
Graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layers |
title_sort |
graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layers |
publisher |
De Gruyter |
series |
Nanofabrication |
issn |
2299-680X |
publishDate |
2014-01-01 |
description |
Recently, relevant advances on graphene as a building block of integrated circuits (ICs) have been demonstrated. Graphene growth and device fabrication related processing has been steadily and intensively powered due to commercial interest; however, there are many challenges associated with the incorporation of graphene into commercial applications which includes challenges associated with the synthesis of this material. Specifically, the controlled deposition of single layer large single crystal graphene on arbitrary supports, is particularly challenging. Previously, we have reported the first demonstration of the transformation of focused ion beam induced deposition of carbon (FIBID-C) into patterned graphitic layers by metal-assisted thermal treatment (Ni foils). In this present work, we continue exploiting the FIBID-C approach as a route for graphene deposition. Here, thin patterned Fe layers are used for the catalysis of graphenization and graphitization. We demonstrate the formation of high quality single and few layer graphene, which evidences, the possibility of using Fe as a catalyst for graphene deposition. The mechanism is understood as the minute precipitation of atomic carbon after supersaturation of some iron carbides formed under a high temperature treatment. As a consequence of the complete wetting of FIBID-C and patterned Fe layers, which enable graphene growth, the as-deposited patterns do not preserve their original shape after the thermal treatment |
topic |
graphene FIBID iron catalyst thermal treatment crystallization |
url |
http://www.degruyter.com/view/j/nanofab.2014.1.issue-1/nanofab-2014-0001/nanofab-2014-0001.xml?format=INT |
work_keys_str_mv |
AT riusgemma graphenecrystalgrowthbythermalprecipitationoffocusedionbeaminduceddepositionofcarbonprecursorviapatternedironthinlayers AT perezmuranofrancesc graphenecrystalgrowthbythermalprecipitationoffocusedionbeaminduceddepositionofcarbonprecursorviapatternedironthinlayers AT yoshimuramasamichi graphenecrystalgrowthbythermalprecipitationoffocusedionbeaminduceddepositionofcarbonprecursorviapatternedironthinlayers |
_version_ |
1725230253582843904 |