Nanometer-Scale Patterning on PMMA Resist by Force Microscopy Lithography
Nanoscale science and technology has today mainly focused on the fabrication of nano devices. In this paper, we study the use of lithography process to build the desired nanostructures directly. Nanolithography on polymethylmethacrylate (PMMA) surface is carried out by using Atomic Force Microscope...
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Iranian Institute of Research and Development in Chemical Industries (IRDCI)-ACECR
2008-12-01
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doaj-633c5d0834734610b466535039600ce62020-11-25T03:28:24ZengIranian Institute of Research and Development in Chemical Industries (IRDCI)-ACECRIranian Journal of Chemistry & Chemical Engineering 1021-99861021-99862008-12-0127429346935Nanometer-Scale Patterning on PMMA Resist by Force Microscopy LithographySedigheh Sadegh Hassani0Zahra Sobat1Hamid Reza Aghabozorg2Catalysis Research Center, Research Institute of Petroleum Industry (RIPI), P.O. Box 18754-4163 Tehran, I.R. IRANCatalysis Research Center, Research Institute of Petroleum Industry (RIPI), P.O. Box 18754-4163 Tehran, I.R. IRANCatalysis Research Center, Research Institute of Petroleum Industry (RIPI), P.O. Box 18754-4163 Tehran, I.R. IRANNanoscale science and technology has today mainly focused on the fabrication of nano devices. In this paper, we study the use of lithography process to build the desired nanostructures directly. Nanolithography on polymethylmethacrylate (PMMA) surface is carried out by using Atomic Force Microscope (AFM) equipped with silicon tip, in contact mode. The analysis of the results shows that the depth of scratches increases with the increase of applied normal force. The scanning velocity is also shown to influence the AFM patterning process. As the scanning velocity increases, the scratch depth decreases. The influence of time and number of scratching cycles is also investigated.http://www.ijcce.ac.ir/article_6935_eadb243fa49f4b76d3673d823edb4585.pdfnano-lithographynano-patterningforce lithographyatomic force microscopyscanning probe lithography |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Sedigheh Sadegh Hassani Zahra Sobat Hamid Reza Aghabozorg |
spellingShingle |
Sedigheh Sadegh Hassani Zahra Sobat Hamid Reza Aghabozorg Nanometer-Scale Patterning on PMMA Resist by Force Microscopy Lithography Iranian Journal of Chemistry & Chemical Engineering nano-lithography nano-patterning force lithography atomic force microscopy scanning probe lithography |
author_facet |
Sedigheh Sadegh Hassani Zahra Sobat Hamid Reza Aghabozorg |
author_sort |
Sedigheh Sadegh Hassani |
title |
Nanometer-Scale Patterning on PMMA Resist by Force Microscopy Lithography |
title_short |
Nanometer-Scale Patterning on PMMA Resist by Force Microscopy Lithography |
title_full |
Nanometer-Scale Patterning on PMMA Resist by Force Microscopy Lithography |
title_fullStr |
Nanometer-Scale Patterning on PMMA Resist by Force Microscopy Lithography |
title_full_unstemmed |
Nanometer-Scale Patterning on PMMA Resist by Force Microscopy Lithography |
title_sort |
nanometer-scale patterning on pmma resist by force microscopy lithography |
publisher |
Iranian Institute of Research and Development in Chemical Industries (IRDCI)-ACECR |
series |
Iranian Journal of Chemistry & Chemical Engineering |
issn |
1021-9986 1021-9986 |
publishDate |
2008-12-01 |
description |
Nanoscale science and technology has today mainly focused on the fabrication of nano devices. In this paper, we study the use of lithography process to build the desired nanostructures directly. Nanolithography on polymethylmethacrylate (PMMA) surface is carried out by using Atomic Force Microscope (AFM) equipped with silicon tip, in contact mode. The analysis of the results shows that the depth of scratches increases with the increase of applied normal force. The scanning velocity is also shown to influence the AFM patterning process. As the scanning velocity increases, the scratch depth decreases. The influence of time and number of scratching cycles is also investigated. |
topic |
nano-lithography nano-patterning force lithography atomic force microscopy scanning probe lithography |
url |
http://www.ijcce.ac.ir/article_6935_eadb243fa49f4b76d3673d823edb4585.pdf |
work_keys_str_mv |
AT sedighehsadeghhassani nanometerscalepatterningonpmmaresistbyforcemicroscopylithography AT zahrasobat nanometerscalepatterningonpmmaresistbyforcemicroscopylithography AT hamidrezaaghabozorg nanometerscalepatterningonpmmaresistbyforcemicroscopylithography |
_version_ |
1724584448589037568 |