The Role of Substrate Temperature and Magnetic Filtering for DLC by Cathodic Arc Evaporation

The Role of Substrate Temperature and Magnetic Filtering for DLC by Cathodic Arc Evaporation

Diamond-like carbon (DLC) films were deposited using two different types of high current arc evaporation. The first process used a magnetic particle filter to remove droplets from the plasma. For the second process, the samples were put into a metallic cage which was placed directly above the plasma...

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Bibliographic Details
Main Authors: Helge Lux, Matthias Edling, Massimiliano Lucci, Julia Kitzmann, Claus Villringer, Peter Siemroth, Fabio De Matteis, Sigurd Schrader
Format: Article
Language:English
Published: MDPI AG 2019-05-01
Series:Coatings
Subjects:
DLC
ta-C
arc evaporation
substrate temperature
hardness
optical constants
Ellipsometry
Online Access:https://www.mdpi.com/2079-6412/9/5/345

Internet

https://www.mdpi.com/2079-6412/9/5/345

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