Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO<sub>2</sub> Bimorphs
Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting issues in electrothermal bimorph actuators whose...
Main Authors: | Peng Wang, YaBing Liu, Donglin Wang, Huan Liu, Weiguo Liu, HuiKai Xie |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2019-10-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/10/10/693 |
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