Fabrication and Characterization of PZT Thick Films for Sensing and Actuation
Lead Zirconate Titanate oxide (PZT) thick films with thicknesses of up to 10 μmwere developed using a modified sol-gel technique. Usually, the film thickness is less than1 μm by conventional sol-gel processing, while the electrical charge accumulation whichreveals the direct effect of piezoele...
Main Authors: | Kuo-Ching Kuo, Ling-Sheng Jang |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2007-04-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/7/4/493/ |
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