Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon
We present a whispering-gallery-mode resonance-enhanced microwave-detected photoconductivity-decay method for contactless measurement of recombination lifetime in highresistivity semiconductor layers. We applied the method to undoped Silicon wafers of high resistivity at 5 and 30 kOhm*cm and measure...
Main Authors: | , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Advanced Electromagnetics
2019-05-01
|
Series: | Advanced Electromagnetics |
Subjects: | |
Online Access: | https://aemjournal.org/index.php/AEM/article/view/1127 |
id |
doaj-67a05492d57b45fb9b1cbc32b1b79387 |
---|---|
record_format |
Article |
spelling |
doaj-67a05492d57b45fb9b1cbc32b1b793872020-11-24T21:55:24ZengAdvanced ElectromagneticsAdvanced Electromagnetics2119-02752019-05-018210110710.7716/aem.v8i2.11271127Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in SiliconV. Yurchenko0T. S. Navruz1M. Ciydem2A. Altintas3Gazi UniversityGazi UniversityEngitek Engineering Technologies LtdBilkent UniversityWe present a whispering-gallery-mode resonance-enhanced microwave-detected photoconductivity-decay method for contactless measurement of recombination lifetime in highresistivity semiconductor layers. We applied the method to undoped Silicon wafers of high resistivity at 5 and 30 kOhm*cm and measured the conductivity relaxation times of 10 and 14 microseconds, respectively. In wafers being considered, they are supposed to be defined by the electron-hole diffusion from the bulk to the wafer surfaces.https://aemjournal.org/index.php/AEM/article/view/1127MicrowaveWhispering Gallery ModePhotoconductivityRecombinationSilicon |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
V. Yurchenko T. S. Navruz M. Ciydem A. Altintas |
spellingShingle |
V. Yurchenko T. S. Navruz M. Ciydem A. Altintas Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon Advanced Electromagnetics Microwave Whispering Gallery Mode Photoconductivity Recombination Silicon |
author_facet |
V. Yurchenko T. S. Navruz M. Ciydem A. Altintas |
author_sort |
V. Yurchenko |
title |
Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon |
title_short |
Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon |
title_full |
Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon |
title_fullStr |
Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon |
title_full_unstemmed |
Microwave Whispering-Gallery-Mode Photoconductivity Measurement of Recombination Lifetime in Silicon |
title_sort |
microwave whispering-gallery-mode photoconductivity measurement of recombination lifetime in silicon |
publisher |
Advanced Electromagnetics |
series |
Advanced Electromagnetics |
issn |
2119-0275 |
publishDate |
2019-05-01 |
description |
We present a whispering-gallery-mode resonance-enhanced microwave-detected photoconductivity-decay method for contactless measurement of recombination lifetime in highresistivity semiconductor layers. We applied the method to undoped Silicon wafers of high resistivity at 5 and 30 kOhm*cm and measured the conductivity relaxation times of 10 and 14 microseconds, respectively. In wafers being considered, they are supposed to be defined by the electron-hole diffusion from the bulk to the wafer surfaces. |
topic |
Microwave Whispering Gallery Mode Photoconductivity Recombination Silicon |
url |
https://aemjournal.org/index.php/AEM/article/view/1127 |
work_keys_str_mv |
AT vyurchenko microwavewhisperinggallerymodephotoconductivitymeasurementofrecombinationlifetimeinsilicon AT tsnavruz microwavewhisperinggallerymodephotoconductivitymeasurementofrecombinationlifetimeinsilicon AT mciydem microwavewhisperinggallerymodephotoconductivitymeasurementofrecombinationlifetimeinsilicon AT aaltintas microwavewhisperinggallerymodephotoconductivitymeasurementofrecombinationlifetimeinsilicon |
_version_ |
1725862866447237120 |