Miniaturized NIR Spectrometer Based on Novel MOEMS Scanning Tilted Grating

This paper presents a dispersive near-infrared spectrometer with features of miniaturization, portability and low cost. The application of a resonantly-driven scanning grating mirror (SGM) as a dispersive element in a crossed Czerny–Turner configuration enables the design of a miniaturized...

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Bibliographic Details
Main Authors: Jian Huang, Quan Wen, Qiuyu Nie, Fei Chang, Ying Zhou, Zhiyu Wen
Format: Article
Language:English
Published: MDPI AG 2018-09-01
Series:Micromachines
Subjects:
Online Access:http://www.mdpi.com/2072-666X/9/10/478