Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators

Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators

This paper presents a novel approach of annular concentric split rings microelectromechanical resonators with tether configuration to reduce anchor loss and gives very high-quality factor (<i>Q</i>) 2.97 Million based on FEA (Finite Element Analysis) simulation. The operating frequencies...

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Bibliographic Details
Main Authors: Muhammad Ammar Khan, Jing-Fu Bao, Fei-Hong Bao, Xin Zhou
Format: Article
Language:English
Published: MDPI AG 2019-04-01
Series:Micromachines
Subjects:
phononic crystal
bandgap
anchor loss
high quality factor
Silicon-Aluminum Nitride (Si-AlN) Micro-Electro-Mechanical-Systems (MEMS) resonator
Online Access:https://www.mdpi.com/2072-666X/10/5/296

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