Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron Sputtering
A thin-film thermocouples (TFTCs) sensor based on silicon carbide substrate, 95 wt% tungsten−5 wt% rhenium (W-5Re) and 74 wt% tungsten−26 wt% rhenium (W-26Re) thermosensitive part with aluminum oxide protective coating layer was designed and fabricated by radio frequency (RF) mag...
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doaj-700556df598746948350e8c09b08adaf2020-11-25T01:34:40ZengMDPI AGMaterials1996-19442019-06-011212198110.3390/ma12121981ma12121981Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron SputteringZhongkai Zhang0Bian Tian1Yan Liu2Zhe Du3Qijing Lin4Zhuangde Jiang5State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaA thin-film thermocouples (TFTCs) sensor based on silicon carbide substrate, 95 wt% tungsten−5 wt% rhenium (W-5Re) and 74 wt% tungsten−26 wt% rhenium (W-26Re) thermosensitive part with aluminum oxide protective coating layer was designed and fabricated by radio frequency (RF) magnetron sputtering. It exhibited a high thermoelectric voltage of 35.51 mV when the temperature difference was 1240 °C (the hot junction temperature was 1420 °C), with an average Seebeck coefficient of 28.63 µV/°C, which was 27% larger than the standard C-type thermocouple wires at the same temperature difference. The repeatability error was ±4.1%, the drift rate was 9.6 °C/h for 10 h and the laser response time was 0.36 ms. Compared to the traditional thermocouple, it could provide long-term temperature testing within 1420 °C for the requirement of high-temperature measurement and high response speed.https://www.mdpi.com/1996-1944/12/12/1981Filmsensorthermoelectricity |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Zhongkai Zhang Bian Tian Yan Liu Zhe Du Qijing Lin Zhuangde Jiang |
spellingShingle |
Zhongkai Zhang Bian Tian Yan Liu Zhe Du Qijing Lin Zhuangde Jiang Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron Sputtering Materials Film sensor thermoelectricity |
author_facet |
Zhongkai Zhang Bian Tian Yan Liu Zhe Du Qijing Lin Zhuangde Jiang |
author_sort |
Zhongkai Zhang |
title |
Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron Sputtering |
title_short |
Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron Sputtering |
title_full |
Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron Sputtering |
title_fullStr |
Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron Sputtering |
title_full_unstemmed |
Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron Sputtering |
title_sort |
thermoelectric characteristics of silicon carbide and tungsten-rhenium-based thin-film thermocouples sensor with protective coating layer by rf magnetron sputtering |
publisher |
MDPI AG |
series |
Materials |
issn |
1996-1944 |
publishDate |
2019-06-01 |
description |
A thin-film thermocouples (TFTCs) sensor based on silicon carbide substrate, 95 wt% tungsten−5 wt% rhenium (W-5Re) and 74 wt% tungsten−26 wt% rhenium (W-26Re) thermosensitive part with aluminum oxide protective coating layer was designed and fabricated by radio frequency (RF) magnetron sputtering. It exhibited a high thermoelectric voltage of 35.51 mV when the temperature difference was 1240 °C (the hot junction temperature was 1420 °C), with an average Seebeck coefficient of 28.63 µV/°C, which was 27% larger than the standard C-type thermocouple wires at the same temperature difference. The repeatability error was ±4.1%, the drift rate was 9.6 °C/h for 10 h and the laser response time was 0.36 ms. Compared to the traditional thermocouple, it could provide long-term temperature testing within 1420 °C for the requirement of high-temperature measurement and high response speed. |
topic |
Film sensor thermoelectricity |
url |
https://www.mdpi.com/1996-1944/12/12/1981 |
work_keys_str_mv |
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