Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron Sputtering

Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron Sputtering

A thin-film thermocouples (TFTCs) sensor based on silicon carbide substrate, 95 wt% tungsten−5 wt% rhenium (W-5Re) and 74 wt% tungsten−26 wt% rhenium (W-26Re) thermosensitive part with aluminum oxide protective coating layer was designed and fabricated by radio frequency (RF) mag...

Full description

Bibliographic Details
Main Authors: Zhongkai Zhang, Bian Tian, Yan Liu, Zhe Du, Qijing Lin, Zhuangde Jiang
Format: Article
Language:English
Published: MDPI AG 2019-06-01
Series:Materials
Subjects:
Film
sensor
thermoelectricity
Online Access:https://www.mdpi.com/1996-1944/12/12/1981
id doaj-700556df598746948350e8c09b08adaf
record_format Article
spelling doaj-700556df598746948350e8c09b08adaf2020-11-25T01:34:40ZengMDPI AGMaterials1996-19442019-06-011212198110.3390/ma12121981ma12121981Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron SputteringZhongkai Zhang0Bian Tian1Yan Liu2Zhe Du3Qijing Lin4Zhuangde Jiang5State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaA thin-film thermocouples (TFTCs) sensor based on silicon carbide substrate, 95 wt% tungsten−5 wt% rhenium (W-5Re) and 74 wt% tungsten−26 wt% rhenium (W-26Re) thermosensitive part with aluminum oxide protective coating layer was designed and fabricated by radio frequency (RF) magnetron sputtering. It exhibited a high thermoelectric voltage of 35.51 mV when the temperature difference was 1240 °C (the hot junction temperature was 1420 °C), with an average Seebeck coefficient of 28.63 µV/°C, which was 27% larger than the standard C-type thermocouple wires at the same temperature difference. The repeatability error was ±4.1%, the drift rate was 9.6 °C/h for 10 h and the laser response time was 0.36 ms. Compared to the traditional thermocouple, it could provide long-term temperature testing within 1420 °C for the requirement of high-temperature measurement and high response speed.https://www.mdpi.com/1996-1944/12/12/1981Filmsensorthermoelectricity
collection DOAJ
language English
format Article
sources DOAJ
author Zhongkai Zhang
Bian Tian
Yan Liu
Zhe Du
Qijing Lin
Zhuangde Jiang
spellingShingle Zhongkai Zhang
Bian Tian
Yan Liu
Zhe Du
Qijing Lin
Zhuangde Jiang
Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron Sputtering
Materials
Film
sensor
thermoelectricity
author_facet Zhongkai Zhang
Bian Tian
Yan Liu
Zhe Du
Qijing Lin
Zhuangde Jiang
author_sort Zhongkai Zhang
title Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron Sputtering
title_short Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron Sputtering
title_full Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron Sputtering
title_fullStr Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron Sputtering
title_full_unstemmed Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron Sputtering
title_sort thermoelectric characteristics of silicon carbide and tungsten-rhenium-based thin-film thermocouples sensor with protective coating layer by rf magnetron sputtering
publisher MDPI AG
series Materials
issn 1996-1944
publishDate 2019-06-01
description A thin-film thermocouples (TFTCs) sensor based on silicon carbide substrate, 95 wt% tungsten−5 wt% rhenium (W-5Re) and 74 wt% tungsten−26 wt% rhenium (W-26Re) thermosensitive part with aluminum oxide protective coating layer was designed and fabricated by radio frequency (RF) magnetron sputtering. It exhibited a high thermoelectric voltage of 35.51 mV when the temperature difference was 1240 °C (the hot junction temperature was 1420 °C), with an average Seebeck coefficient of 28.63 µV/°C, which was 27% larger than the standard C-type thermocouple wires at the same temperature difference. The repeatability error was ±4.1%, the drift rate was 9.6 °C/h for 10 h and the laser response time was 0.36 ms. Compared to the traditional thermocouple, it could provide long-term temperature testing within 1420 °C for the requirement of high-temperature measurement and high response speed.
topic Film
sensor
thermoelectricity
url https://www.mdpi.com/1996-1944/12/12/1981
work_keys_str_mv AT zhongkaizhang thermoelectriccharacteristicsofsiliconcarbideandtungstenrheniumbasedthinfilmthermocouplessensorwithprotectivecoatinglayerbyrfmagnetronsputtering
AT biantian thermoelectriccharacteristicsofsiliconcarbideandtungstenrheniumbasedthinfilmthermocouplessensorwithprotectivecoatinglayerbyrfmagnetronsputtering
AT yanliu thermoelectriccharacteristicsofsiliconcarbideandtungstenrheniumbasedthinfilmthermocouplessensorwithprotectivecoatinglayerbyrfmagnetronsputtering
AT zhedu thermoelectriccharacteristicsofsiliconcarbideandtungstenrheniumbasedthinfilmthermocouplessensorwithprotectivecoatinglayerbyrfmagnetronsputtering
AT qijinglin thermoelectriccharacteristicsofsiliconcarbideandtungstenrheniumbasedthinfilmthermocouplessensorwithprotectivecoatinglayerbyrfmagnetronsputtering
AT zhuangdejiang thermoelectriccharacteristicsofsiliconcarbideandtungstenrheniumbasedthinfilmthermocouplessensorwithprotectivecoatinglayerbyrfmagnetronsputtering
_version_ 1725070441527115776

Similar Items