Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron Sputtering
A thin-film thermocouples (TFTCs) sensor based on silicon carbide substrate, 95 wt% tungsten−5 wt% rhenium (W-5Re) and 74 wt% tungsten−26 wt% rhenium (W-26Re) thermosensitive part with aluminum oxide protective coating layer was designed and fabricated by radio frequency (RF) mag...
Main Authors: | Zhongkai Zhang, Bian Tian, Yan Liu, Zhe Du, Qijing Lin, Zhuangde Jiang |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2019-06-01
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Series: | Materials |
Subjects: | |
Online Access: | https://www.mdpi.com/1996-1944/12/12/1981 |
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