Design of Readout Circuit with Quadrature Error and Auxiliary PLL for MEMS Vibratory Gyroscope
Traditional MEMS gyroscope readout eliminates quadrature error and relies on the phase relationship between the drive displacement and the Coriolis position to accomplish a coherent demodulation. This scheme shows some risk, especially for a mode-matching gyro. If only a slight resonant frequency de...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-08-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/20/16/4564 |