PRODUCTION AND CHARACTERIZATION OF Cr AND CrN HARD COATINGS DEPOSITED BY UNBALANCED MAGNETRON SPUTTERING
In this work, we present the results of Cr and CrN coatings deposited using unbalanced magnetron sputtering at different substrate temperatures. The layers with thickness < 1μm were produced at different temperatures (100, 300 and 500 oC) on AISI H13 steel and (100) Silicon and analyzed by XRD an...
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| Format: | Article |
| Language: | English |
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Universidad Nacional de Colombia
2013-01-01
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| Series: | Momento |
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| Online Access: | https://revistas.unal.edu.co/index.php/momento/article/view/41555 |