Advanced Fabrication of Single-Crystal Diamond Membranes for Quantum Technologies

Many promising applications of single crystal diamond and its color centers as sensor platform and in photonics require free-standing membranes with a thickness ranging from several micrometers to the few 100 nm range. In this work, we present an approach to conveniently fabricate such thin membrane...

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Bibliographic Details
Main Authors: Michel Challier, Selda Sonusen, Arne Barfuss, Dominik Rohner, Daniel Riedel, Johannes Koelbl, Marc Ganzhorn, Patrick Appel, Patrick Maletinsky, Elke Neu
Format: Article
Language:English
Published: MDPI AG 2018-03-01
Series:Micromachines
Subjects:
Online Access:http://www.mdpi.com/2072-666X/9/4/148