Influence of the Secondary Ion Beam Source on the Laser Damage Mechanism and Stress Evolution of IBS Hafnia Layers
Ion beam sputtered hafnia is a preferred high index coating material for laser applications. It exhibits a mostly amorphous structure and an adequate laser-induced damage (LIDT) threshold. In this work, we investigated the influence of an assisting ion source on the film stress as well as the LIDT o...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-12-01
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Series: | Applied Sciences |
Subjects: | |
Online Access: | https://www.mdpi.com/2076-3417/11/1/189 |