The Surface Morphology Evolution of GaN Nucleation Layer during Annealing and Its Influence on the Crystal Quality of GaN Films

The Surface Morphology Evolution of GaN Nucleation Layer during Annealing and Its Influence on the Crystal Quality of GaN Films

The surface morphology evolution of GaN nucleation layer (NL) after different annealing time has been investigated by atomic force microscope. The surface morphologies of GaN NL after different annealing time are island-like. It is observed that for 0-min annealing time sample nucleation islands (NI...

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Bibliographic Details
Main Authors: Lin Shang, Bingshe Xu, Shufang Ma, Qingming Liu, Huican Ouyang, Hengsheng Shan, Xiaodong Hao, Bin Han
Format: Article
Language:English
Published: MDPI AG 2021-02-01
Series:Coatings
Subjects:
GaN
annealing time
nucleation island
dislocation
Online Access:https://www.mdpi.com/2079-6412/11/2/188

Internet

https://www.mdpi.com/2079-6412/11/2/188

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