Flow characteristics and velocity fields of a front opening unified pod at open door condition
Particle contamination decreases product quality in semiconductor industries. Nowadays, the size of the chips and features has significantly reduced; thus increasing the importance of moisture removal from front opening unified pods during manufacturing and transportation of semiconductor wafers. An...
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doaj-796c6a6f282e49cf8662871ca36979652020-11-25T03:52:04ZengElsevierCase Studies in Thermal Engineering2214-157X2020-10-0121100704Flow characteristics and velocity fields of a front opening unified pod at open door conditionTee Lin0Omid Ali Zargar1Dexter Lyndon Sabusap2Oscar Juiña3Tzu-Chieh Lee4Shih-Cheng Hu5Graham Leggett6Department of Energy and Refrigerating Air-conditioning Engineering, National Taipei University of Technology, Taipei, TaiwanDepartment of Energy and Refrigerating Air-conditioning Engineering, National Taipei University of Technology, Taipei, TaiwanDepartment of Energy and Refrigerating Air-conditioning Engineering, National Taipei University of Technology, Taipei, TaiwanDepartment of Energy and Refrigerating Air-conditioning Engineering, National Taipei University of Technology, Taipei, TaiwanDepartment of Energy and Refrigerating Air-conditioning Engineering, National Taipei University of Technology, Taipei, TaiwanDepartment of Energy and Refrigerating Air-conditioning Engineering, National Taipei University of Technology, Taipei, Taiwan; Corresponding author. Department of Energy and Refrigerating Air-conditioning Engineering, National Taipei University of Technology, No. 1, Section 3, Zhongxiao East Road, Da'an District, Taipei City, 106, Taiwan.LI-COR Biosciences, Lincoln, NE, USAParticle contamination decreases product quality in semiconductor industries. Nowadays, the size of the chips and features has significantly reduced; thus increasing the importance of moisture removal from front opening unified pods during manufacturing and transportation of semiconductor wafers. An innovative laminar air curtain and a diffuser purge device were designed at Taipei Tech. These devices are currently used in many semiconductor industries. Smoke flow visualization was used in the present study to evaluate and justify the performance of three different moisture removal methods: air curtain, conventional purge, and diffuser purge. A mini-environment and front opening unified pod model were constructed with the same size and shape as the real applications at manufacturing facilities. An innovative laser sweep technique was designed at Taipei Tech, which can provide a plane laser light sheet during the experiments. The smoke flow patterns were recorded by a digital camera. The relative humidity was monitored using relative humidity sensors that were installed on dummy wafers inside the front opening unified pod. Study of the flow patterns, velocity fields, and relative humidity data show that the combination of air curtain and diffuser purge techniques presented the highest performance, and is therefore recommended to the industry.http://www.sciencedirect.com/science/article/pii/S2214157X19303491Pollution controlFront opening unified podAir curtainConventional purgeFlow visualizationParticle image velocimetry |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Tee Lin Omid Ali Zargar Dexter Lyndon Sabusap Oscar Juiña Tzu-Chieh Lee Shih-Cheng Hu Graham Leggett |
spellingShingle |
Tee Lin Omid Ali Zargar Dexter Lyndon Sabusap Oscar Juiña Tzu-Chieh Lee Shih-Cheng Hu Graham Leggett Flow characteristics and velocity fields of a front opening unified pod at open door condition Case Studies in Thermal Engineering Pollution control Front opening unified pod Air curtain Conventional purge Flow visualization Particle image velocimetry |
author_facet |
Tee Lin Omid Ali Zargar Dexter Lyndon Sabusap Oscar Juiña Tzu-Chieh Lee Shih-Cheng Hu Graham Leggett |
author_sort |
Tee Lin |
title |
Flow characteristics and velocity fields of a front opening unified pod at open door condition |
title_short |
Flow characteristics and velocity fields of a front opening unified pod at open door condition |
title_full |
Flow characteristics and velocity fields of a front opening unified pod at open door condition |
title_fullStr |
Flow characteristics and velocity fields of a front opening unified pod at open door condition |
title_full_unstemmed |
Flow characteristics and velocity fields of a front opening unified pod at open door condition |
title_sort |
flow characteristics and velocity fields of a front opening unified pod at open door condition |
publisher |
Elsevier |
series |
Case Studies in Thermal Engineering |
issn |
2214-157X |
publishDate |
2020-10-01 |
description |
Particle contamination decreases product quality in semiconductor industries. Nowadays, the size of the chips and features has significantly reduced; thus increasing the importance of moisture removal from front opening unified pods during manufacturing and transportation of semiconductor wafers. An innovative laminar air curtain and a diffuser purge device were designed at Taipei Tech. These devices are currently used in many semiconductor industries. Smoke flow visualization was used in the present study to evaluate and justify the performance of three different moisture removal methods: air curtain, conventional purge, and diffuser purge. A mini-environment and front opening unified pod model were constructed with the same size and shape as the real applications at manufacturing facilities. An innovative laser sweep technique was designed at Taipei Tech, which can provide a plane laser light sheet during the experiments. The smoke flow patterns were recorded by a digital camera. The relative humidity was monitored using relative humidity sensors that were installed on dummy wafers inside the front opening unified pod. Study of the flow patterns, velocity fields, and relative humidity data show that the combination of air curtain and diffuser purge techniques presented the highest performance, and is therefore recommended to the industry. |
topic |
Pollution control Front opening unified pod Air curtain Conventional purge Flow visualization Particle image velocimetry |
url |
http://www.sciencedirect.com/science/article/pii/S2214157X19303491 |
work_keys_str_mv |
AT teelin flowcharacteristicsandvelocityfieldsofafrontopeningunifiedpodatopendoorcondition AT omidalizargar flowcharacteristicsandvelocityfieldsofafrontopeningunifiedpodatopendoorcondition AT dexterlyndonsabusap flowcharacteristicsandvelocityfieldsofafrontopeningunifiedpodatopendoorcondition AT oscarjuina flowcharacteristicsandvelocityfieldsofafrontopeningunifiedpodatopendoorcondition AT tzuchiehlee flowcharacteristicsandvelocityfieldsofafrontopeningunifiedpodatopendoorcondition AT shihchenghu flowcharacteristicsandvelocityfieldsofafrontopeningunifiedpodatopendoorcondition AT grahamleggett flowcharacteristicsandvelocityfieldsofafrontopeningunifiedpodatopendoorcondition |
_version_ |
1724484525065502720 |