Flow characteristics and velocity fields of a front opening unified pod at open door condition
Particle contamination decreases product quality in semiconductor industries. Nowadays, the size of the chips and features has significantly reduced; thus increasing the importance of moisture removal from front opening unified pods during manufacturing and transportation of semiconductor wafers. An...
Main Authors: | Tee Lin, Omid Ali Zargar, Dexter Lyndon Sabusap, Oscar Juiña, Tzu-Chieh Lee, Shih-Cheng Hu, Graham Leggett |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2020-10-01
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Series: | Case Studies in Thermal Engineering |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2214157X19303491 |
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