Thin-Piezo on Single-Crystal Silicon Reactive Etched RF MEMS Resonators
This paper demonstrates how a single crystal silicon wafer can be used to fabricate thinfilm piezoelectric-on-silicon (TPoS) resonators by utilizing a modified version of Single Crystal Silicon Reactive Etch and Metallization (SCREAM) process. The developed process enables the fabrication of MEMS re...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9151110/ |