Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness
In this paper, we develop a technique for realizing multi-centimeter-long lithium niobate on insulator (LNOI) waveguides with a propagation loss as low as 0.027 dB/cm. Our technique relies on patterning a chromium thin film coated on the top surface of LNOI into a hard mask with a femtosecond laser...
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| Language: | English |
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MDPI AG
2018-11-01
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| Series: | Nanomaterials |
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| Online Access: | https://www.mdpi.com/2079-4991/8/11/910 |
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doaj-7ad4d5be10554cc78b29555ba97862042020-11-24T21:50:21ZengMDPI AGNanomaterials2079-49912018-11-0181191010.3390/nano8110910nano8110910Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface RoughnessRongbo Wu0Min Wang1Jian Xu2Jia Qi3Wei Chu4Zhiwei Fang5Jianhao Zhang6Junxia Zhou7Lingling Qiao8Zhifang Chai9Jintian Lin10Ya Cheng11State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, ChinaState Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, ChinaState Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, ChinaState Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, ChinaState Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, ChinaState Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, ChinaState Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, ChinaState Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, ChinaState Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, ChinaState Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, ChinaState Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, ChinaState Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, ChinaIn this paper, we develop a technique for realizing multi-centimeter-long lithium niobate on insulator (LNOI) waveguides with a propagation loss as low as 0.027 dB/cm. Our technique relies on patterning a chromium thin film coated on the top surface of LNOI into a hard mask with a femtosecond laser followed by chemo-mechanical polishing for structuring the LNOI into the waveguides. The surface roughness on the waveguides was determined with an atomic force microscope to be 0.452 nm. The approach is compatible with other surface patterning technologies, such as optical and electron beam lithographies or laser direct writing, enabling high-throughput manufacturing of large-scale LNOI-based photonic integrated circuits.https://www.mdpi.com/2079-4991/8/11/910lithium niobatewaveguidephotonic integrated circuitpropagation lossoptical lithographychemo-mechanical polishing |
| collection |
DOAJ |
| language |
English |
| format |
Article |
| sources |
DOAJ |
| author |
Rongbo Wu Min Wang Jian Xu Jia Qi Wei Chu Zhiwei Fang Jianhao Zhang Junxia Zhou Lingling Qiao Zhifang Chai Jintian Lin Ya Cheng |
| spellingShingle |
Rongbo Wu Min Wang Jian Xu Jia Qi Wei Chu Zhiwei Fang Jianhao Zhang Junxia Zhou Lingling Qiao Zhifang Chai Jintian Lin Ya Cheng Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness Nanomaterials lithium niobate waveguide photonic integrated circuit propagation loss optical lithography chemo-mechanical polishing |
| author_facet |
Rongbo Wu Min Wang Jian Xu Jia Qi Wei Chu Zhiwei Fang Jianhao Zhang Junxia Zhou Lingling Qiao Zhifang Chai Jintian Lin Ya Cheng |
| author_sort |
Rongbo Wu |
| title |
Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness |
| title_short |
Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness |
| title_full |
Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness |
| title_fullStr |
Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness |
| title_full_unstemmed |
Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness |
| title_sort |
long low-loss-litium niobate on insulator waveguides with sub-nanometer surface roughness |
| publisher |
MDPI AG |
| series |
Nanomaterials |
| issn |
2079-4991 |
| publishDate |
2018-11-01 |
| description |
In this paper, we develop a technique for realizing multi-centimeter-long lithium niobate on insulator (LNOI) waveguides with a propagation loss as low as 0.027 dB/cm. Our technique relies on patterning a chromium thin film coated on the top surface of LNOI into a hard mask with a femtosecond laser followed by chemo-mechanical polishing for structuring the LNOI into the waveguides. The surface roughness on the waveguides was determined with an atomic force microscope to be 0.452 nm. The approach is compatible with other surface patterning technologies, such as optical and electron beam lithographies or laser direct writing, enabling high-throughput manufacturing of large-scale LNOI-based photonic integrated circuits. |
| topic |
lithium niobate waveguide photonic integrated circuit propagation loss optical lithography chemo-mechanical polishing |
| url |
https://www.mdpi.com/2079-4991/8/11/910 |
| work_keys_str_mv |
AT rongbowu longlowlosslitiumniobateoninsulatorwaveguideswithsubnanometersurfaceroughness AT minwang longlowlosslitiumniobateoninsulatorwaveguideswithsubnanometersurfaceroughness AT jianxu longlowlosslitiumniobateoninsulatorwaveguideswithsubnanometersurfaceroughness AT jiaqi longlowlosslitiumniobateoninsulatorwaveguideswithsubnanometersurfaceroughness AT weichu longlowlosslitiumniobateoninsulatorwaveguideswithsubnanometersurfaceroughness AT zhiweifang longlowlosslitiumniobateoninsulatorwaveguideswithsubnanometersurfaceroughness AT jianhaozhang longlowlosslitiumniobateoninsulatorwaveguideswithsubnanometersurfaceroughness AT junxiazhou longlowlosslitiumniobateoninsulatorwaveguideswithsubnanometersurfaceroughness AT linglingqiao longlowlosslitiumniobateoninsulatorwaveguideswithsubnanometersurfaceroughness AT zhifangchai longlowlosslitiumniobateoninsulatorwaveguideswithsubnanometersurfaceroughness AT jintianlin longlowlosslitiumniobateoninsulatorwaveguideswithsubnanometersurfaceroughness AT yacheng longlowlosslitiumniobateoninsulatorwaveguideswithsubnanometersurfaceroughness |
| _version_ |
1725884640755974144 |