Realizing Q > 300 000 in diamond microdisks for optomechanics via etch optimization
Nanophotonic structures in single–crystal diamond (SCD) that simultaneously confine and co-localize photons and phonons are highly desirable for applications in quantum information science and optomechanics. Here we describe an optimized process for etching SCD microdis...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2019-01-01
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| Series: | APL Photonics |
| Online Access: | http://dx.doi.org/10.1063/1.5053122 |