Obliquely Deposited Titanium Nitride Nanorod Arrays as Surface-Enhanced Raman Scattering Substrates

In this work, titanium nitride (TiN) nanorod arrays were prepared as surface-enhanced Raman scattering (SERS) substrates using glancing angle deposition (GLAD) in a magnetron sputtering system. The nitrogen flow rate was varied from <i>R<sub>N</sub></i><sub>2</sub>...

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Bibliographic Details
Main Authors: Yi-Jun Jen, Meng-Jie Lin, Hou-Lon Cheang, Teh-Li Chan
Format: Article
Language:English
Published: MDPI AG 2019-11-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/19/21/4765