Optimization of SnO<sub>2</sub>-Based CMOS-Integrated Gas Sensors by Mono-, Bi- and Trimetallic Nanoparticles

Optimization of SnO<sub>2</sub>-Based CMOS-Integrated Gas Sensors by Mono-, Bi- and Trimetallic Nanoparticles

In this paper, we report on the optimization of SnO<sub>2</sub>-based thin film gas sensor devices by mono-, bi- and trimetallic nanoparticles. Ag, AgRu, and AgRuPd nanoparticles are sputter deposited on CMOS-integrated SnO<sub>2</sub>-thin film gas sensor devices. The CMOS d...

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Bibliographic Details
Main Authors: Robert Wimmer-Teubenbacher, Florentyna Sosada-Ludwikowska, Anton Köck, Stephan Steinhauer, Mukhles Sowwan, Vidyadhar Singh
Format: Article
Language:English
Published: MDPI AG 2020-01-01
Series:Proceedings
Subjects:
SnO<sub>2</sub>
gas sensors
metallic nanoparticles
Online Access:https://www.mdpi.com/2504-3900/56/1/43
Description
Summary:In this paper, we report on the optimization of SnO<sub>2</sub>-based thin film gas sensor devices by mono-, bi- and trimetallic nanoparticles. Ag, AgRu, and AgRuPd nanoparticles are sputter deposited on CMOS-integrated SnO<sub>2</sub>-thin film gas sensor devices. The CMOS device is a worldwide unique chip containing an array of eight microhotplates. The response towards the target gas CO was dramatically increased from 10% to more than 70% by using trimetallic AgRuPd nanoparticles.
ISSN:2504-3900

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