Research Progress of Optical Fabrication and Surface-Microstructure Modification of SiC
SiC has become the best candidate material for space mirror and optical devices due to a series of favorable physical and chemical properties. Fine surface optical quality with the surface roughness (RMS) less than 1 nm is necessary for fine optical application. However, various defects are present...
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Series: | Journal of Nanomaterials |
Online Access: | http://dx.doi.org/10.1155/2012/984048 |
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doaj-7c33e500dd4246e9b65d1227261597622020-11-24T22:47:30ZengHindawi LimitedJournal of Nanomaterials1687-41101687-41292012-01-01201210.1155/2012/984048984048Research Progress of Optical Fabrication and Surface-Microstructure Modification of SiCFang Jiang0Yan Liu1Yong Yang2Zheng-Ren Huang3Dan Li4Gui-ling Liu5Xue-Jian Liu6State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, ChinaState Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, ChinaState Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, ChinaState Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, ChinaState Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, ChinaState Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, ChinaState Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, ChinaSiC has become the best candidate material for space mirror and optical devices due to a series of favorable physical and chemical properties. Fine surface optical quality with the surface roughness (RMS) less than 1 nm is necessary for fine optical application. However, various defects are present in SiC ceramics, and it is very difficult to polish SiC ceramic matrix with the 1 nm RMS. Surface modification of SiC ceramics must be done on the SiC substrate. Four kinds of surface-modification routes including the hot pressed glass, the C/SiC clapping, SiC clapping, and Si clapping on SiC surface have been reported and reviewed here. The methods of surface modification, the mechanism of preparation, and the disadvantages and advantages are focused on in this paper. In our view, PVD Si is the best choice for surface modification of SiC mirror.http://dx.doi.org/10.1155/2012/984048 |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Fang Jiang Yan Liu Yong Yang Zheng-Ren Huang Dan Li Gui-ling Liu Xue-Jian Liu |
spellingShingle |
Fang Jiang Yan Liu Yong Yang Zheng-Ren Huang Dan Li Gui-ling Liu Xue-Jian Liu Research Progress of Optical Fabrication and Surface-Microstructure Modification of SiC Journal of Nanomaterials |
author_facet |
Fang Jiang Yan Liu Yong Yang Zheng-Ren Huang Dan Li Gui-ling Liu Xue-Jian Liu |
author_sort |
Fang Jiang |
title |
Research Progress of Optical Fabrication and Surface-Microstructure Modification of SiC |
title_short |
Research Progress of Optical Fabrication and Surface-Microstructure Modification of SiC |
title_full |
Research Progress of Optical Fabrication and Surface-Microstructure Modification of SiC |
title_fullStr |
Research Progress of Optical Fabrication and Surface-Microstructure Modification of SiC |
title_full_unstemmed |
Research Progress of Optical Fabrication and Surface-Microstructure Modification of SiC |
title_sort |
research progress of optical fabrication and surface-microstructure modification of sic |
publisher |
Hindawi Limited |
series |
Journal of Nanomaterials |
issn |
1687-4110 1687-4129 |
publishDate |
2012-01-01 |
description |
SiC has become the best candidate material for space mirror and optical devices due to a series of favorable physical and chemical properties. Fine surface optical quality with the surface roughness (RMS) less than 1 nm is necessary for fine optical application. However, various defects are present in SiC ceramics, and it is very difficult to polish SiC ceramic matrix with the 1 nm RMS. Surface modification of SiC ceramics must be done on the SiC substrate. Four kinds of surface-modification routes including the hot pressed glass, the C/SiC clapping, SiC clapping, and Si clapping on SiC surface have been reported and reviewed here. The methods of surface modification, the mechanism of preparation, and the disadvantages and advantages are focused on in this paper. In our view, PVD Si is the best choice for surface modification of SiC mirror. |
url |
http://dx.doi.org/10.1155/2012/984048 |
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