| Summary: | Surface-layer defects of M-plane sapphire caused by ultrasonic vibration-assisted cutting were investigated in this paper through comparison cutting experiments. Topography analysis results indicate that when the cutting direction is not along a-axis or c-axis, the spalling defects of conventional cutting groove are asymmetric because the probabilities of activated cleavage/twinning systems vary with machining direction; however, the vibrational cutting groove presents better symmetry and less spalling owning to the propagation of stress wave. The cross-section of cutting groove was obtained by focus ion beam cutting. The cross-section analysis shows that the subsurface defects of conventional cutting groove involve median cracks and lateral cracks, and the main propagating path of cracks is towards downward, which is the cause of the generation of serious spalling; however, lateral cracks are the main defect in the subsurface of the vibrational cutting groove, and they mainly propagate towards the free surface and give rise to material removal. The subsurface quality of cutting groove with ultrasonic assistance is better than that of the conventional cutting groove. It is evident that ultrasonic vibration can prevent the median crack from extending towards bulk material and contribute to improve the uniformity of groove quality.
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