Preparation of Ag/TiO<sub>2</sub>/ITO UV Detector and Its Photoelectronic Properties

TiO<sub>2</sub>-based UV detectors with Ag antidot/TiO<sub>2</sub>/ITO sandwich structure were prepared by RF magnetron sputtering and colloidal crystal template technology. The microstructure and photoelectronic properties of the UV detectors were investigated by SEM, XRD, f...

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Main Authors: DAI Songyan, QI Hongfei, LIU Dabo, TENG Lejin, LUO Fei, TIAN Ye, CHEN Dongsheng
Format: Article
Language:zho
Published: Journal of Aeronautical Materials 2016-12-01
Series:Journal of Aeronautical Materials
Subjects:
Online Access:http://jam.biam.ac.cn/CN/10.11868/j.issn.1005-5053.2016.6.012
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spelling doaj-7e7e44b0ee454445b1310b863201ca222020-11-25T00:40:53ZzhoJournal of Aeronautical MaterialsJournal of Aeronautical Materials1005-50531005-50532016-12-01366747810.11868/j.issn.1005-5053.2016.6.01220160612Preparation of Ag/TiO<sub>2</sub>/ITO UV Detector and Its Photoelectronic PropertiesDAI Songyan0QI Hongfei1LIU Dabo2TENG Lejin3LUO Fei4TIAN Ye5CHEN Dongsheng6Department of Steel and Rare-Noble Metals, Beijing Institute of Aeronautical Materials, Beijing 100095, ChinaDepartment of Steel and Rare-Noble Metals, Beijing Institute of Aeronautical Materials, Beijing 100095, ChinaDepartment of Steel and Rare-Noble Metals, Beijing Institute of Aeronautical Materials, Beijing 100095, ChinaDepartment of Steel and Rare-Noble Metals, Beijing Institute of Aeronautical Materials, Beijing 100095, ChinaDepartment of Steel and Rare-Noble Metals, Beijing Institute of Aeronautical Materials, Beijing 100095, ChinaDepartment of Steel and Rare-Noble Metals, Beijing Institute of Aeronautical Materials, Beijing 100095, ChinaDepartment of Steel and Rare-Noble Metals, Beijing Institute of Aeronautical Materials, Beijing 100095, ChinaTiO<sub>2</sub>-based UV detectors with Ag antidot/TiO<sub>2</sub>/ITO sandwich structure were prepared by RF magnetron sputtering and colloidal crystal template technology. The microstructure and photoelectronic properties of the UV detectors were investigated by SEM, XRD, four point probe and semiconductor parameter instrument. The experimental results show that pore size of Ag antidot has an obvious effect on the photoelectronic properties of the detectors. With the increase of pore size, the dark current increases and the response time is prolonged, while the photocurrent is increased at first, then is decreased. Meanwhile, it is found that photoelectronic properties are optimum when the pore size is 4.2 μm. Antidot array electrodes with large pore size possess higher electrical conductivity, lower ultraviolet transmittance and higher recombination probability of electron-hole pair. Therefore, the pore size variation exhibits significant effluence on the photoelectronic properties of the UV detector.http://jam.biam.ac.cn/CN/10.11868/j.issn.1005-5053.2016.6.012antidot arrayAg/TiO<sub>2</sub>/ITOultraviolet (UV) photo-detectorphotoelectronic property
collection DOAJ
language zho
format Article
sources DOAJ
author DAI Songyan
QI Hongfei
LIU Dabo
TENG Lejin
LUO Fei
TIAN Ye
CHEN Dongsheng
spellingShingle DAI Songyan
QI Hongfei
LIU Dabo
TENG Lejin
LUO Fei
TIAN Ye
CHEN Dongsheng
Preparation of Ag/TiO<sub>2</sub>/ITO UV Detector and Its Photoelectronic Properties
Journal of Aeronautical Materials
antidot array
Ag/TiO<sub>2</sub>/ITO
ultraviolet (UV) photo-detector
photoelectronic property
author_facet DAI Songyan
QI Hongfei
LIU Dabo
TENG Lejin
LUO Fei
TIAN Ye
CHEN Dongsheng
author_sort DAI Songyan
title Preparation of Ag/TiO<sub>2</sub>/ITO UV Detector and Its Photoelectronic Properties
title_short Preparation of Ag/TiO<sub>2</sub>/ITO UV Detector and Its Photoelectronic Properties
title_full Preparation of Ag/TiO<sub>2</sub>/ITO UV Detector and Its Photoelectronic Properties
title_fullStr Preparation of Ag/TiO<sub>2</sub>/ITO UV Detector and Its Photoelectronic Properties
title_full_unstemmed Preparation of Ag/TiO<sub>2</sub>/ITO UV Detector and Its Photoelectronic Properties
title_sort preparation of ag/tio<sub>2</sub>/ito uv detector and its photoelectronic properties
publisher Journal of Aeronautical Materials
series Journal of Aeronautical Materials
issn 1005-5053
1005-5053
publishDate 2016-12-01
description TiO<sub>2</sub>-based UV detectors with Ag antidot/TiO<sub>2</sub>/ITO sandwich structure were prepared by RF magnetron sputtering and colloidal crystal template technology. The microstructure and photoelectronic properties of the UV detectors were investigated by SEM, XRD, four point probe and semiconductor parameter instrument. The experimental results show that pore size of Ag antidot has an obvious effect on the photoelectronic properties of the detectors. With the increase of pore size, the dark current increases and the response time is prolonged, while the photocurrent is increased at first, then is decreased. Meanwhile, it is found that photoelectronic properties are optimum when the pore size is 4.2 μm. Antidot array electrodes with large pore size possess higher electrical conductivity, lower ultraviolet transmittance and higher recombination probability of electron-hole pair. Therefore, the pore size variation exhibits significant effluence on the photoelectronic properties of the UV detector.
topic antidot array
Ag/TiO<sub>2</sub>/ITO
ultraviolet (UV) photo-detector
photoelectronic property
url http://jam.biam.ac.cn/CN/10.11868/j.issn.1005-5053.2016.6.012
work_keys_str_mv AT daisongyan preparationofagtiosub2subitouvdetectoranditsphotoelectronicproperties
AT qihongfei preparationofagtiosub2subitouvdetectoranditsphotoelectronicproperties
AT liudabo preparationofagtiosub2subitouvdetectoranditsphotoelectronicproperties
AT tenglejin preparationofagtiosub2subitouvdetectoranditsphotoelectronicproperties
AT luofei preparationofagtiosub2subitouvdetectoranditsphotoelectronicproperties
AT tianye preparationofagtiosub2subitouvdetectoranditsphotoelectronicproperties
AT chendongsheng preparationofagtiosub2subitouvdetectoranditsphotoelectronicproperties
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