Wafer-Scale Fabrication and Assembly Method of Multichannel Microelectrode Arrays for ECoG Application
High density electrocorticography (ECoG)-based microelectrode arrays (MEAs) are fabricated to timely record the neural activities to provide the fundamental understanding in neuroscience and biomedical engineering. This paper aims to introduce a device-based concept and wafer-scale fabrication proce...
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doaj-7fda8fcfe8a543118c1d67a243c641c42021-01-30T00:02:37ZengMDPI AGElectronics2079-92922021-01-011031631610.3390/electronics10030316Wafer-Scale Fabrication and Assembly Method of Multichannel Microelectrode Arrays for ECoG ApplicationCong Wang0Yu-Chen Wei1Ho-Kun Sung2Alok Kumar3Zhong-Liang Zhou4Dan-Qing Zou5Cheng-Peng Jiang6Guo-Feng Yan7Jee-Hyun Choi8Rajendra Dhakal9School of Electronics and Information Engineering, Harbin Institute of Technology, Harbin 150001, ChinaSchool of Electronics and Information Engineering, Harbin Institute of Technology, Harbin 150001, ChinaKorea Advanced Nano Fab Center (KANC), Suwon 16229, KoreaSchool of Electronics and Information Engineering, Harbin Institute of Technology, Harbin 150001, ChinaSchool of Electronics and Information Engineering, Harbin Institute of Technology, Harbin 150001, ChinaSchool of Electronics and Information Engineering, Harbin Institute of Technology, Harbin 150001, ChinaResearch Center for Smart Sensing, Zhejiang Lab, Hangzhou 310000, ChinaResearch Center for Smart Sensing, Zhejiang Lab, Hangzhou 310000, ChinaCenter for Neural Science, Korea Institute of Science and Technology (KIST), Seoul 25451, KoreaDepartment of Computer Science and Engineering, Sejong University, Seoul 05006, KoreaHigh density electrocorticography (ECoG)-based microelectrode arrays (MEAs) are fabricated to timely record the neural activities to provide the fundamental understanding in neuroscience and biomedical engineering. This paper aims to introduce a device-based concept and wafer-scale fabrication process for MEAs. Flexible and biocompatible polyimide is applied on MEAs to bear all possible stress and strain. Detailed fabrication key techniques, including surface treatment, polyimide stability measurement, evaporation process, and curing conditions, have been discussed thoroughly. Moreover, the fabricated polyimide-based MEAs are surface-mounted on well-packaged printed circuit boards (PCBs) via a slot-type connector without any additional wire bonding to make the signal recording process easier. An absence seizure was recorded during the in vivo test, which shows the availability of signal recording based on the presented MEAs. The proposed MEAs could be remained at the skull, while the connector and PCBs can be disassembled apart. Therefore, the testing sample will get less suffering. To verify the robustness of the fabricated MEAs, the impedance properties were characterized using electrochemical impedance spectroscopy. The measured results indicate an average impedance of 12.3 ± 0.675 kΩ at 1 kHz. In total, 10 groups of MEAs were sample tested, and over 90% of the total 60 channels per 1-MEAs operated efficiently.https://www.mdpi.com/2079-9292/10/3/316microelectrode arrayswafer-scale fabricationmultichannelneuronal recordings |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Cong Wang Yu-Chen Wei Ho-Kun Sung Alok Kumar Zhong-Liang Zhou Dan-Qing Zou Cheng-Peng Jiang Guo-Feng Yan Jee-Hyun Choi Rajendra Dhakal |
spellingShingle |
Cong Wang Yu-Chen Wei Ho-Kun Sung Alok Kumar Zhong-Liang Zhou Dan-Qing Zou Cheng-Peng Jiang Guo-Feng Yan Jee-Hyun Choi Rajendra Dhakal Wafer-Scale Fabrication and Assembly Method of Multichannel Microelectrode Arrays for ECoG Application Electronics microelectrode arrays wafer-scale fabrication multichannel neuronal recordings |
author_facet |
Cong Wang Yu-Chen Wei Ho-Kun Sung Alok Kumar Zhong-Liang Zhou Dan-Qing Zou Cheng-Peng Jiang Guo-Feng Yan Jee-Hyun Choi Rajendra Dhakal |
author_sort |
Cong Wang |
title |
Wafer-Scale Fabrication and Assembly Method of Multichannel Microelectrode Arrays for ECoG Application |
title_short |
Wafer-Scale Fabrication and Assembly Method of Multichannel Microelectrode Arrays for ECoG Application |
title_full |
Wafer-Scale Fabrication and Assembly Method of Multichannel Microelectrode Arrays for ECoG Application |
title_fullStr |
Wafer-Scale Fabrication and Assembly Method of Multichannel Microelectrode Arrays for ECoG Application |
title_full_unstemmed |
Wafer-Scale Fabrication and Assembly Method of Multichannel Microelectrode Arrays for ECoG Application |
title_sort |
wafer-scale fabrication and assembly method of multichannel microelectrode arrays for ecog application |
publisher |
MDPI AG |
series |
Electronics |
issn |
2079-9292 |
publishDate |
2021-01-01 |
description |
High density electrocorticography (ECoG)-based microelectrode arrays (MEAs) are fabricated to timely record the neural activities to provide the fundamental understanding in neuroscience and biomedical engineering. This paper aims to introduce a device-based concept and wafer-scale fabrication process for MEAs. Flexible and biocompatible polyimide is applied on MEAs to bear all possible stress and strain. Detailed fabrication key techniques, including surface treatment, polyimide stability measurement, evaporation process, and curing conditions, have been discussed thoroughly. Moreover, the fabricated polyimide-based MEAs are surface-mounted on well-packaged printed circuit boards (PCBs) via a slot-type connector without any additional wire bonding to make the signal recording process easier. An absence seizure was recorded during the in vivo test, which shows the availability of signal recording based on the presented MEAs. The proposed MEAs could be remained at the skull, while the connector and PCBs can be disassembled apart. Therefore, the testing sample will get less suffering. To verify the robustness of the fabricated MEAs, the impedance properties were characterized using electrochemical impedance spectroscopy. The measured results indicate an average impedance of 12.3 ± 0.675 kΩ at 1 kHz. In total, 10 groups of MEAs were sample tested, and over 90% of the total 60 channels per 1-MEAs operated efficiently. |
topic |
microelectrode arrays wafer-scale fabrication multichannel neuronal recordings |
url |
https://www.mdpi.com/2079-9292/10/3/316 |
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