Characterization of Platinum-Based Thin Films Deposited by Thermionic Vacuum Arc (TVA) Method
The current work aimed to characterize the morphology, chemical, and mechanical properties of Pt and PtTi thin films deposited via thermionic vacuum arc (TVA) method on glass and silicon substrates. The deposited thin films were characterized by means of a scanning electron microscope technique (SEM...
Main Authors: | , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-04-01
|
Series: | Materials |
Subjects: | |
Online Access: | https://www.mdpi.com/1996-1944/13/7/1796 |
id |
doaj-81bdfd8d931244ada334e752899fca19 |
---|---|
record_format |
Article |
spelling |
doaj-81bdfd8d931244ada334e752899fca192020-11-25T03:10:56ZengMDPI AGMaterials1996-19442020-04-01131796179610.3390/ma13071796Characterization of Platinum-Based Thin Films Deposited by Thermionic Vacuum Arc (TVA) MethodSebastian Cozma0Rodica Vlǎdoiu1Aurelia Mandes2Virginia Dinca3Gabriel Prodan4Vilma Buršíková5Department of Physics, Faculty of Applied Sciences and Engineering, Ovidius University of Constanta, Bvd. Mamaia, No 124, 900527 Constanta, RomaniaDepartment of Physics, Faculty of Applied Sciences and Engineering, Ovidius University of Constanta, Bvd. Mamaia, No 124, 900527 Constanta, RomaniaDepartment of Physics, Faculty of Applied Sciences and Engineering, Ovidius University of Constanta, Bvd. Mamaia, No 124, 900527 Constanta, RomaniaDepartment of Physics, Faculty of Applied Sciences and Engineering, Ovidius University of Constanta, Bvd. Mamaia, No 124, 900527 Constanta, RomaniaDepartment of Physics, Faculty of Applied Sciences and Engineering, Ovidius University of Constanta, Bvd. Mamaia, No 124, 900527 Constanta, RomaniaInstitute of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 611 37 Brno, Czech RepublicThe current work aimed to characterize the morphology, chemical, and mechanical properties of Pt and PtTi thin films deposited via thermionic vacuum arc (TVA) method on glass and silicon substrates. The deposited thin films were characterized by means of a scanning electron microscope technique (SEM). The quantitative elemental microanalysis was done using energy-dispersive X-ray spectroscopy (EDS). The tribological properties were studied by a ball-on-disc tribometer, and the mechanical properties were measured using nanoindentation tests. The roughness, as well as the micro and nanoscale features, were characterized using atomic force microscopy (AFM) and transmission electron microscopy (TEM). The wettability of the deposited Pt and PtTi thin films was investigated by the surface free energy evaluation (SFE) method. The purpose of our study was to prove the potential applications of Pt-based thin films in fields, such as nanoelectronics, fuel cells, medicine, and materials science.https://www.mdpi.com/1996-1944/13/7/1796PtPtTi thin filmsTVAmorphological properties |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Sebastian Cozma Rodica Vlǎdoiu Aurelia Mandes Virginia Dinca Gabriel Prodan Vilma Buršíková |
spellingShingle |
Sebastian Cozma Rodica Vlǎdoiu Aurelia Mandes Virginia Dinca Gabriel Prodan Vilma Buršíková Characterization of Platinum-Based Thin Films Deposited by Thermionic Vacuum Arc (TVA) Method Materials Pt PtTi thin films TVA morphological properties |
author_facet |
Sebastian Cozma Rodica Vlǎdoiu Aurelia Mandes Virginia Dinca Gabriel Prodan Vilma Buršíková |
author_sort |
Sebastian Cozma |
title |
Characterization of Platinum-Based Thin Films Deposited by Thermionic Vacuum Arc (TVA) Method |
title_short |
Characterization of Platinum-Based Thin Films Deposited by Thermionic Vacuum Arc (TVA) Method |
title_full |
Characterization of Platinum-Based Thin Films Deposited by Thermionic Vacuum Arc (TVA) Method |
title_fullStr |
Characterization of Platinum-Based Thin Films Deposited by Thermionic Vacuum Arc (TVA) Method |
title_full_unstemmed |
Characterization of Platinum-Based Thin Films Deposited by Thermionic Vacuum Arc (TVA) Method |
title_sort |
characterization of platinum-based thin films deposited by thermionic vacuum arc (tva) method |
publisher |
MDPI AG |
series |
Materials |
issn |
1996-1944 |
publishDate |
2020-04-01 |
description |
The current work aimed to characterize the morphology, chemical, and mechanical properties of Pt and PtTi thin films deposited via thermionic vacuum arc (TVA) method on glass and silicon substrates. The deposited thin films were characterized by means of a scanning electron microscope technique (SEM). The quantitative elemental microanalysis was done using energy-dispersive X-ray spectroscopy (EDS). The tribological properties were studied by a ball-on-disc tribometer, and the mechanical properties were measured using nanoindentation tests. The roughness, as well as the micro and nanoscale features, were characterized using atomic force microscopy (AFM) and transmission electron microscopy (TEM). The wettability of the deposited Pt and PtTi thin films was investigated by the surface free energy evaluation (SFE) method. The purpose of our study was to prove the potential applications of Pt-based thin films in fields, such as nanoelectronics, fuel cells, medicine, and materials science. |
topic |
Pt PtTi thin films TVA morphological properties |
url |
https://www.mdpi.com/1996-1944/13/7/1796 |
work_keys_str_mv |
AT sebastiancozma characterizationofplatinumbasedthinfilmsdepositedbythermionicvacuumarctvamethod AT rodicavladoiu characterizationofplatinumbasedthinfilmsdepositedbythermionicvacuumarctvamethod AT aureliamandes characterizationofplatinumbasedthinfilmsdepositedbythermionicvacuumarctvamethod AT virginiadinca characterizationofplatinumbasedthinfilmsdepositedbythermionicvacuumarctvamethod AT gabrielprodan characterizationofplatinumbasedthinfilmsdepositedbythermionicvacuumarctvamethod AT vilmabursikova characterizationofplatinumbasedthinfilmsdepositedbythermionicvacuumarctvamethod |
_version_ |
1724656320868515840 |