Characterization of Platinum-Based Thin Films Deposited by Thermionic Vacuum Arc (TVA) Method

Characterization of Platinum-Based Thin Films Deposited by Thermionic Vacuum Arc (TVA) Method

The current work aimed to characterize the morphology, chemical, and mechanical properties of Pt and PtTi thin films deposited via thermionic vacuum arc (TVA) method on glass and silicon substrates. The deposited thin films were characterized by means of a scanning electron microscope technique (SEM...

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Bibliographic Details
Main Authors: Sebastian Cozma, Rodica Vlǎdoiu, Aurelia Mandes, Virginia Dinca, Gabriel Prodan, Vilma Buršíková
Format: Article
Language:English
Published: MDPI AG 2020-04-01
Series:Materials
Subjects:
Pt
PtTi thin films
TVA
morphological properties
Online Access:https://www.mdpi.com/1996-1944/13/7/1796

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