A numerical study of squeeze-film damping in MEMS-based structures including rarefaction effects
In a variety of MEMS applications, the thin film of fluid responsible of squeeze-film damping results to be rarefied and, thus, not suitable to be modeled though the classical Navier-Stokes equation. The simplest way to consider fluid rarefaction is the introduction of a slight modification into its...
Main Authors: | , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Gruppo Italiano Frattura
2012-12-01
|
Series: | Frattura ed Integrità Strutturale |
Subjects: | |
Online Access: | https://212.237.37.202/index.php/fis/article/view/168 |
id |
doaj-81d4218f7b064364a740f7312a7d1ea0 |
---|---|
record_format |
Article |
spelling |
doaj-81d4218f7b064364a740f7312a7d1ea02021-01-30T17:15:40ZengGruppo Italiano FratturaFrattura ed Integrità Strutturale1971-89932012-12-01723A numerical study of squeeze-film damping in MEMS-based structures including rarefaction effectsMaria F. Pantano0Leonardo Pagnotta1Salvatore Nigro2Dept. of Mechanical Engineering, University of Calabria, 87036 Rende (CS), Italy.Dept. of Mechanical Engineering, University of Calabria, 87036 Rende (CS), Italy.Dept. of Medical Sciences, University of Magna Graecia, 88100 Germaneto (CZ), Italy.In a variety of MEMS applications, the thin film of fluid responsible of squeeze-film damping results to be rarefied and, thus, not suitable to be modeled though the classical Navier-Stokes equation. The simplest way to consider fluid rarefaction is the introduction of a slight modification into its ordinary formulation, by substituting the standard fluid viscosity with an effective viscosity term. In the present paper, some squeeze-film damping problems of both parallel and torsion plates at decreasing pressure are studied by numerical solving a full 3D Navier-Stokes equation, where the effective viscosity is computed according to proper expressions already included in the literature. Furthermore, the same expressions for the effective viscosity are implemented within known analytical models, still derived from the Navier-Stokes equation. In all the considered cases, the numerical results are shown to be very promising, providing comparable or even better agreement with the experimental data than the corresponding analytical results, even at low air pressure. Thus, unlike what is usually agreed in the literature, the effective viscosity approach can be efficiently applied at low pressure regimes, especially when this is combined with a finite element analysis (FEA)https://212.237.37.202/index.php/fis/article/view/168Squeeze-film damping |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Maria F. Pantano Leonardo Pagnotta Salvatore Nigro |
spellingShingle |
Maria F. Pantano Leonardo Pagnotta Salvatore Nigro A numerical study of squeeze-film damping in MEMS-based structures including rarefaction effects Frattura ed Integrità Strutturale Squeeze-film damping |
author_facet |
Maria F. Pantano Leonardo Pagnotta Salvatore Nigro |
author_sort |
Maria F. Pantano |
title |
A numerical study of squeeze-film damping in MEMS-based structures including rarefaction effects |
title_short |
A numerical study of squeeze-film damping in MEMS-based structures including rarefaction effects |
title_full |
A numerical study of squeeze-film damping in MEMS-based structures including rarefaction effects |
title_fullStr |
A numerical study of squeeze-film damping in MEMS-based structures including rarefaction effects |
title_full_unstemmed |
A numerical study of squeeze-film damping in MEMS-based structures including rarefaction effects |
title_sort |
numerical study of squeeze-film damping in mems-based structures including rarefaction effects |
publisher |
Gruppo Italiano Frattura |
series |
Frattura ed Integrità Strutturale |
issn |
1971-8993 |
publishDate |
2012-12-01 |
description |
In a variety of MEMS applications, the thin film of fluid responsible of squeeze-film damping results to be rarefied and, thus, not suitable to be modeled though the classical Navier-Stokes equation. The simplest way to consider fluid rarefaction is the introduction of a slight modification into its ordinary formulation, by substituting the standard fluid viscosity with an effective viscosity term. In the present paper, some squeeze-film damping problems of both parallel and torsion plates at decreasing pressure are studied by numerical solving a full 3D Navier-Stokes equation, where the effective viscosity is computed according to proper expressions already included in the literature. Furthermore, the same expressions for the effective viscosity are implemented within known analytical models, still derived from the Navier-Stokes equation. In all the considered cases, the numerical results are shown to be very promising, providing comparable or even
better agreement with the experimental data than the corresponding analytical results, even at low air pressure. Thus, unlike what is usually agreed in the literature, the effective viscosity approach can be efficiently applied at low pressure regimes, especially when this is combined with a finite element analysis (FEA) |
topic |
Squeeze-film damping |
url |
https://212.237.37.202/index.php/fis/article/view/168 |
work_keys_str_mv |
AT mariafpantano anumericalstudyofsqueezefilmdampinginmemsbasedstructuresincludingrarefactioneffects AT leonardopagnotta anumericalstudyofsqueezefilmdampinginmemsbasedstructuresincludingrarefactioneffects AT salvatorenigro anumericalstudyofsqueezefilmdampinginmemsbasedstructuresincludingrarefactioneffects AT mariafpantano numericalstudyofsqueezefilmdampinginmemsbasedstructuresincludingrarefactioneffects AT leonardopagnotta numericalstudyofsqueezefilmdampinginmemsbasedstructuresincludingrarefactioneffects AT salvatorenigro numericalstudyofsqueezefilmdampinginmemsbasedstructuresincludingrarefactioneffects |
_version_ |
1724317844638793728 |