Optical properties of AlN layers obtained by magnetron sputtering

The growth of AlN layers on glass substrates using magnetron sputtering method was performed and the grown layers were subjected to optical measurements. Transmission spectra of the layers grown at different content of N2 in the atmosphere were obtained. The transmission spectra as well as energy ga...

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Bibliographic Details
Main Authors: Potera Piotr, Wisz Grzegorz, Szyller Łukasz
Format: Article
Language:English
Published: Sciendo 2018-12-01
Series:Materials Science-Poland
Subjects:
AlN
Online Access:http://www.degruyter.com/view/j/msp.2018.36.issue-4/msp-2018-0087/msp-2018-0087.xml?format=INT

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