Fabrication of Micro- and Nanopillars from Pyrolytic Carbon and Tetrahedral Amorphous Carbon

Fabrication of Micro- and Nanopillars from Pyrolytic Carbon and Tetrahedral Amorphous Carbon

Pattern formation of pyrolyzed carbon (PyC) and tetrahedral amorphous carbon (ta-C) thin films were investigated at micro- and nanoscale. Micro- and nanopillars were fabricated from both materials, and their biocompatibility was studied with cell viability tests. Carbon materials are known to be ver...

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Bibliographic Details
Main Authors: Joonas J. Heikkinen, Emilia Peltola, Niklas Wester, Jari Koskinen, Tomi Laurila, Sami Franssila, Ville Jokinen
Format: Article
Language:English
Published: MDPI AG 2019-07-01
Series:Micromachines
Subjects:
pyrolysis
nanopillars
cell viability
ta-C
embossing
black silicon
neural stem cell
SU-8
Online Access:https://www.mdpi.com/2072-666X/10/8/510

Internet

https://www.mdpi.com/2072-666X/10/8/510

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