A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes
This paper proposes a solution for sensing spatial angular velocity. A high-performance digital interface application specific integrated circuit (ASIC) for triple-axis micro-electromechanical systems (MEMS) vibratory gyroscopes is presented. The technique of time multiplexing is employed for synerg...
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doaj-83cf33cd5b3846d99eabc1325e1b667b2020-11-25T02:46:18ZengMDPI AGSensors1424-82202020-09-01205460546010.3390/s20195460A Digital Interface ASIC for Triple-Axis MEMS Vibratory GyroscopesRisheng Lv0Qiang Fu1Weiping Chen2Liang Yin3Xiaowei Liu4Yufeng Zhang5MEMS Center, Harbin Institute of Technology, Harbin 150001, ChinaMEMS Center, Harbin Institute of Technology, Harbin 150001, ChinaMEMS Center, Harbin Institute of Technology, Harbin 150001, ChinaMEMS Center, Harbin Institute of Technology, Harbin 150001, ChinaMEMS Center, Harbin Institute of Technology, Harbin 150001, ChinaMEMS Center, Harbin Institute of Technology, Harbin 150001, ChinaThis paper proposes a solution for sensing spatial angular velocity. A high-performance digital interface application specific integrated circuit (ASIC) for triple-axis micro-electromechanical systems (MEMS) vibratory gyroscopes is presented. The technique of time multiplexing is employed for synergetic stable drive control and precise angular velocity measurement in three separate degrees of freedom (DOF). Self-excited digital closed loop drives the proof mass in sensing elements at its inherent resonant frequency for Coriolis force generation during angular rotation. The analog front ends in both drive and sense loops are comprised of low-noise charge-voltage (C/V) converters and multi-channel incremental zoom analog-to-digital converters (ADC), so that capacitance variation between combs induced by mechanical motion is transformed into digital voltage signals. Other circuitry elements, such as loop controlling and accurate demodulation modules, are all implemented in digital logics. Automatic amplitude stabilization is mainly realized by peak detection and proportion-integration (PI) control. Nonlinear digital gain adjustment is designed for rapid establishment of resonance oscillation and linearity improvement. Manufactured in a standard 0.35-μm complementary metal-oxide-semiconductor (CMOS) technology, this design achieves a bias instability of 2.1°/h and a nonlinearity of 0.012% over full-scale range.https://www.mdpi.com/1424-8220/20/19/5460inertial navigationMEMS vibratory gyroscopestriple-axis digital interface ASIClow-noise analog front endnonlinear stabilization controlincremental zoom ADC |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Risheng Lv Qiang Fu Weiping Chen Liang Yin Xiaowei Liu Yufeng Zhang |
spellingShingle |
Risheng Lv Qiang Fu Weiping Chen Liang Yin Xiaowei Liu Yufeng Zhang A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes Sensors inertial navigation MEMS vibratory gyroscopes triple-axis digital interface ASIC low-noise analog front end nonlinear stabilization control incremental zoom ADC |
author_facet |
Risheng Lv Qiang Fu Weiping Chen Liang Yin Xiaowei Liu Yufeng Zhang |
author_sort |
Risheng Lv |
title |
A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes |
title_short |
A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes |
title_full |
A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes |
title_fullStr |
A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes |
title_full_unstemmed |
A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes |
title_sort |
digital interface asic for triple-axis mems vibratory gyroscopes |
publisher |
MDPI AG |
series |
Sensors |
issn |
1424-8220 |
publishDate |
2020-09-01 |
description |
This paper proposes a solution for sensing spatial angular velocity. A high-performance digital interface application specific integrated circuit (ASIC) for triple-axis micro-electromechanical systems (MEMS) vibratory gyroscopes is presented. The technique of time multiplexing is employed for synergetic stable drive control and precise angular velocity measurement in three separate degrees of freedom (DOF). Self-excited digital closed loop drives the proof mass in sensing elements at its inherent resonant frequency for Coriolis force generation during angular rotation. The analog front ends in both drive and sense loops are comprised of low-noise charge-voltage (C/V) converters and multi-channel incremental zoom analog-to-digital converters (ADC), so that capacitance variation between combs induced by mechanical motion is transformed into digital voltage signals. Other circuitry elements, such as loop controlling and accurate demodulation modules, are all implemented in digital logics. Automatic amplitude stabilization is mainly realized by peak detection and proportion-integration (PI) control. Nonlinear digital gain adjustment is designed for rapid establishment of resonance oscillation and linearity improvement. Manufactured in a standard 0.35-μm complementary metal-oxide-semiconductor (CMOS) technology, this design achieves a bias instability of 2.1°/h and a nonlinearity of 0.012% over full-scale range. |
topic |
inertial navigation MEMS vibratory gyroscopes triple-axis digital interface ASIC low-noise analog front end nonlinear stabilization control incremental zoom ADC |
url |
https://www.mdpi.com/1424-8220/20/19/5460 |
work_keys_str_mv |
AT rishenglv adigitalinterfaceasicfortripleaxismemsvibratorygyroscopes AT qiangfu adigitalinterfaceasicfortripleaxismemsvibratorygyroscopes AT weipingchen adigitalinterfaceasicfortripleaxismemsvibratorygyroscopes AT liangyin adigitalinterfaceasicfortripleaxismemsvibratorygyroscopes AT xiaoweiliu adigitalinterfaceasicfortripleaxismemsvibratorygyroscopes AT yufengzhang adigitalinterfaceasicfortripleaxismemsvibratorygyroscopes AT rishenglv digitalinterfaceasicfortripleaxismemsvibratorygyroscopes AT qiangfu digitalinterfaceasicfortripleaxismemsvibratorygyroscopes AT weipingchen digitalinterfaceasicfortripleaxismemsvibratorygyroscopes AT liangyin digitalinterfaceasicfortripleaxismemsvibratorygyroscopes AT xiaoweiliu digitalinterfaceasicfortripleaxismemsvibratorygyroscopes AT yufengzhang digitalinterfaceasicfortripleaxismemsvibratorygyroscopes |
_version_ |
1724759259828191232 |