A langasite surface acoustic wave wide-range temperature sensor with excellent linearity and high sensitivity

A langasite surface acoustic wave wide-range temperature sensor with excellent linearity and high sensitivity

Langasite (LGS) surface acoustic wave (SAW) temperature sensors have a large second order temperature coefficient of frequency, which leads to their non-linear and non-monotonic responses in a wide temperature range and possibly makes the measured temperatures non-unique for a specific sensor respon...

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Main Authors: Hongsheng Xu, Hao Jin, Shurong Dong, Jinkai Chen, Xinyu Song, Weipeng Xuan, Lin Shi, Shuyi Huang, Pengjun Zhang, Jikui Luo
Format: Article
Language:English
Published: AIP Publishing LLC 2021-01-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/5.0036554
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spelling doaj-84495b79a25e4d20a7556a45e39a41ce2021-02-02T21:32:44ZengAIP Publishing LLCAIP Advances2158-32262021-01-01111015143015143-710.1063/5.0036554A langasite surface acoustic wave wide-range temperature sensor with excellent linearity and high sensitivityHongsheng Xu0Hao Jin1Shurong Dong2Jinkai Chen3Xinyu Song4Weipeng Xuan5Lin Shi6Shuyi Huang7Pengjun Zhang8Jikui Luo9Key Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, ChinaKey Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, ChinaKey Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, ChinaMinistry of Education Key Laboratory of RF Circuits and Systems, Hangzhou Dianzi University, Hangzhou 310018, ChinaKey Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, ChinaMinistry of Education Key Laboratory of RF Circuits and Systems, Hangzhou Dianzi University, Hangzhou 310018, ChinaKey Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, ChinaKey Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, ChinaCollege of Life Sciences, China Jiliang University, Hangzhou 310018, ChinaKey Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, ChinaLangasite (LGS) surface acoustic wave (SAW) temperature sensors have a large second order temperature coefficient of frequency, which leads to their non-linear and non-monotonic responses in a wide temperature range and possibly makes the measured temperatures non-unique for a specific sensor response. Here, we propose a high-temperature Pt/LGS SAW sensor with linear frequency–temperature behavior in a wide temperature range, which was fabricated on a LGS (0°, 138.5°, 72°) substrate. The sensor has a single acoustic mode, but dual resonances with similar second- and third-order temperature sensitivities that were utilized for achieving a linear frequency–temperature response by a method of difference. A linear relationship between the measured sensor output (Δfm21) and temperature was obtained in the range of −60 °C to 700 °C, consistent with the theoretical analysis. The sensor has a high sensitivity of −167 ppm/K for the whole temperature range. All the results demonstrated exciting prospects of the sensor for wide temperature monitoring in harsh environments.http://dx.doi.org/10.1063/5.0036554
collection DOAJ
language English
format Article
sources DOAJ
author Hongsheng Xu
Hao Jin
Shurong Dong
Jinkai Chen
Xinyu Song
Weipeng Xuan
Lin Shi
Shuyi Huang
Pengjun Zhang
Jikui Luo
spellingShingle Hongsheng Xu
Hao Jin
Shurong Dong
Jinkai Chen
Xinyu Song
Weipeng Xuan
Lin Shi
Shuyi Huang
Pengjun Zhang
Jikui Luo
A langasite surface acoustic wave wide-range temperature sensor with excellent linearity and high sensitivity
AIP Advances
author_facet Hongsheng Xu
Hao Jin
Shurong Dong
Jinkai Chen
Xinyu Song
Weipeng Xuan
Lin Shi
Shuyi Huang
Pengjun Zhang
Jikui Luo
author_sort Hongsheng Xu
title A langasite surface acoustic wave wide-range temperature sensor with excellent linearity and high sensitivity
title_short A langasite surface acoustic wave wide-range temperature sensor with excellent linearity and high sensitivity
title_full A langasite surface acoustic wave wide-range temperature sensor with excellent linearity and high sensitivity
title_fullStr A langasite surface acoustic wave wide-range temperature sensor with excellent linearity and high sensitivity
title_full_unstemmed A langasite surface acoustic wave wide-range temperature sensor with excellent linearity and high sensitivity
title_sort langasite surface acoustic wave wide-range temperature sensor with excellent linearity and high sensitivity
publisher AIP Publishing LLC
series AIP Advances
issn 2158-3226
publishDate 2021-01-01
description Langasite (LGS) surface acoustic wave (SAW) temperature sensors have a large second order temperature coefficient of frequency, which leads to their non-linear and non-monotonic responses in a wide temperature range and possibly makes the measured temperatures non-unique for a specific sensor response. Here, we propose a high-temperature Pt/LGS SAW sensor with linear frequency–temperature behavior in a wide temperature range, which was fabricated on a LGS (0°, 138.5°, 72°) substrate. The sensor has a single acoustic mode, but dual resonances with similar second- and third-order temperature sensitivities that were utilized for achieving a linear frequency–temperature response by a method of difference. A linear relationship between the measured sensor output (Δfm21) and temperature was obtained in the range of −60 °C to 700 °C, consistent with the theoretical analysis. The sensor has a high sensitivity of −167 ppm/K for the whole temperature range. All the results demonstrated exciting prospects of the sensor for wide temperature monitoring in harsh environments.
url http://dx.doi.org/10.1063/5.0036554
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