Nanostructured Sensors for Detection of Hydrogen Peroxide Vapours

• Main Authors: Vladimir AROUTIOUNIAN, Valeri ARAKELYAN, Mikayel ALEKSANYAN, Artak SAYUNTS, Gohar SHAHNAZARYAN, Petr KACER, Pavel PICHA, Jiri KOVARIK, Jakub PEKAREK, Berndt JOOST
• Format: Article
• Language: English
• Published: IFSA Publishing, S.L. 2017-06-01
• Series: Sensors & Transducers
• Subjects: Sensor; Hydrogen peroxide vapours; Semiconductor; Nanostructured film
• Online Access: http://www.sensorsportal.com/HTML/DIGEST/june_2017/Vol_213/P_2932.pdf

Solid-state sensors made from doped metal oxide ZnO<La> and SnO2<Co> were prepared for detection of hydrogen peroxide vapours. Gas sensitive nanostructured films were manufactured by the high-frequency magnetron sputtering method. Thicknesses of deposited semiconductor nanostructured films were measured and its morphology was investigated. The average size of nanoparticles was equal to 18.7 nm for deposited films. The response of the prepared sensors was measured at different temperatures of the sensor work body and different concentrations of hydrogen peroxide vapours. It was found that both La-doped ZnO and Co-doped SnO2 sensors exhibit a sufficient sensitivity to 10 ppm of hydrogen peroxide vapours at the operating temperature 220 °C and 200 °C, respectively. It was established that the dependencies of the sensor sensitivity on hydrogen peroxide vapours concentration at the work body temperature 150 °C have a linear characteristic for both prepared structures and can be used for determination of hydrogen peroxide vapours concentration.