Development of radio-frequency heating-assisted nanoimprint with PETG solution for nanostructure-based biosensors

Development of radio-frequency heating-assisted nanoimprint with PETG solution for nanostructure-based biosensors

We present radio-frequency (RF) heating-assisted nanoimprint lithography (NIL) for the rapid fabrication of nanostructured biochips. The chips were spin-coated using a RF-sensitive polymer film, namely polyethylene terephthalate glycol-modified (PETG). The RF heating process takes advantage of rapid...

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Main Authors: Tsung-Yeh Wu, Hsuan-Yeh Hsu, Kuang-Li Lee, Sen-Yeu Yang, Pei-Kuen Wei
Format: Article
Language:English
Published: AIP Publishing LLC 2017-04-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.4982699
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spelling doaj-8956809b0121457d9bf4ac308abf610d2020-11-25T01:11:19ZengAIP Publishing LLCAIP Advances2158-32262017-04-0174045311045311-710.1063/1.4982699060704ADVDevelopment of radio-frequency heating-assisted nanoimprint with PETG solution for nanostructure-based biosensorsTsung-Yeh Wu0Hsuan-Yeh Hsu1Kuang-Li Lee2Sen-Yeu Yang3Pei-Kuen Wei4Department of Mechanical Engineering, National Taiwan University, Taipei 10617, TaiwanInstitute of Optoelectronic Sciences, National Taiwan Ocean University, Keelung 20224, TaiwanResearch Center for Applied Sciences, Academia Sinica, Taipei 11529, TaiwanDepartment of Mechanical Engineering, National Taiwan University, Taipei 10617, TaiwanResearch Center for Applied Sciences, Academia Sinica, Taipei 11529, TaiwanWe present radio-frequency (RF) heating-assisted nanoimprint lithography (NIL) for the rapid fabrication of nanostructured biochips. The chips were spin-coated using a RF-sensitive polymer film, namely polyethylene terephthalate glycol-modified (PETG). The RF heating process takes advantage of rapid temperature increases and cooling for NIL. Using a patterned nickel film as the mold, various nanostructures, such as nanowire, nanorod, and nanogrid arrays, were successfully fabricated within several seconds. For surface plasmon biosensing chips, the silver-coated nanowire arrays achieved a linewidth of 6.01 nm and wavelength sensitivity of 550 nm per refractive index unit. The functionality of the sensor was verified by observing the label-free antigen–antibody interactions.http://dx.doi.org/10.1063/1.4982699
collection DOAJ
language English
format Article
sources DOAJ
author Tsung-Yeh Wu
Hsuan-Yeh Hsu
Kuang-Li Lee
Sen-Yeu Yang
Pei-Kuen Wei
spellingShingle Tsung-Yeh Wu
Hsuan-Yeh Hsu
Kuang-Li Lee
Sen-Yeu Yang
Pei-Kuen Wei
Development of radio-frequency heating-assisted nanoimprint with PETG solution for nanostructure-based biosensors
AIP Advances
author_facet Tsung-Yeh Wu
Hsuan-Yeh Hsu
Kuang-Li Lee
Sen-Yeu Yang
Pei-Kuen Wei
author_sort Tsung-Yeh Wu
title Development of radio-frequency heating-assisted nanoimprint with PETG solution for nanostructure-based biosensors
title_short Development of radio-frequency heating-assisted nanoimprint with PETG solution for nanostructure-based biosensors
title_full Development of radio-frequency heating-assisted nanoimprint with PETG solution for nanostructure-based biosensors
title_fullStr Development of radio-frequency heating-assisted nanoimprint with PETG solution for nanostructure-based biosensors
title_full_unstemmed Development of radio-frequency heating-assisted nanoimprint with PETG solution for nanostructure-based biosensors
title_sort development of radio-frequency heating-assisted nanoimprint with petg solution for nanostructure-based biosensors
publisher AIP Publishing LLC
series AIP Advances
issn 2158-3226
publishDate 2017-04-01
description We present radio-frequency (RF) heating-assisted nanoimprint lithography (NIL) for the rapid fabrication of nanostructured biochips. The chips were spin-coated using a RF-sensitive polymer film, namely polyethylene terephthalate glycol-modified (PETG). The RF heating process takes advantage of rapid temperature increases and cooling for NIL. Using a patterned nickel film as the mold, various nanostructures, such as nanowire, nanorod, and nanogrid arrays, were successfully fabricated within several seconds. For surface plasmon biosensing chips, the silver-coated nanowire arrays achieved a linewidth of 6.01 nm and wavelength sensitivity of 550 nm per refractive index unit. The functionality of the sensor was verified by observing the label-free antigen–antibody interactions.
url http://dx.doi.org/10.1063/1.4982699
work_keys_str_mv AT tsungyehwu developmentofradiofrequencyheatingassistednanoimprintwithpetgsolutionfornanostructurebasedbiosensors
AT hsuanyehhsu developmentofradiofrequencyheatingassistednanoimprintwithpetgsolutionfornanostructurebasedbiosensors
AT kuanglilee developmentofradiofrequencyheatingassistednanoimprintwithpetgsolutionfornanostructurebasedbiosensors
AT senyeuyang developmentofradiofrequencyheatingassistednanoimprintwithpetgsolutionfornanostructurebasedbiosensors
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