Four-Terminal Square Piezoresistive Sensors for MEMS Pressure Sensing
The sensitivity of four-terminal piezoresistive sensors commonly referred to as van der Pauw (VDP) structure is investigated. The VDP sensor is considered to be fabricated on (100) silicon due to its potential application in MEMS (microelectromechanical systems) pressure sensors. The sensitivity of...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2017-01-01
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| Series: | Journal of Sensors |
| Online Access: | http://dx.doi.org/10.1155/2017/6954875 |