Substrate Temperature Dependent Properties of Sputtered AlN:Er Thin Film for In-Situ Luminescence Sensing of Al/AlN Multilayer Coating Health

Substrate Temperature Dependent Properties of Sputtered AlN:Er Thin Film for In-Situ Luminescence Sensing of Al/AlN Multilayer Coating Health

The integrity and reliability of surface protective coatings deposited on metal surface could be in-situ monitored via the attractive luminescence sensing technique. In this paper, we report the influence of substrate temperature on the properties of erbium (Er) doped aluminum nitride (AlN) film, wh...

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Bibliographic Details
Main Authors: Liping Fang, Yidong Jiang, Shengfa Zhu, Jingjing Ding, Dongxu Zhang, Anyi Yin, Piheng Chen
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Materials
Subjects:
luminescence sensing
aluminum nitride
erbium doping
magnetron sputtering
Online Access:https://www.mdpi.com/1996-1944/11/11/2196

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