Transient Process Optimization for Dual-Arm Cluster Tools With Wafer Revisiting
In wafer fabrication, it is imperative to minimize the transient process of cluster tools for the sake of on-demand and preventive maintenance. Due to the trend of multi-type and small-batch production, transient processes appear more and more frequently. Thus, the optimization problems of transient...
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doaj-94097b95d06d4f24a4c953625d7f4fcb2021-04-05T17:38:21ZengIEEEIEEE Access2169-35362021-01-019500935010510.1109/ACCESS.2021.30698889389780Transient Process Optimization for Dual-Arm Cluster Tools With Wafer RevisitingJipeng Wang0https://orcid.org/0000-0001-8361-0864Hesuan Hu1https://orcid.org/0000-0002-8724-2058Chunrong Pan2Liang Li3School of Mechano-Electronic Engineering, Xidian University, Xi’an, ChinaSchool of Mechano-Electronic Engineering, Xidian University, Xi’an, ChinaSchool of Mechanical and Electrical Engineering, Jiangxi University of Science and Technology, Ganzhou, ChinaSchool of Information Science and Engineering, Wuhan University of Science and Technology, Wuhan, ChinaIn wafer fabrication, it is imperative to minimize the transient process of cluster tools for the sake of on-demand and preventive maintenance. Due to the trend of multi-type and small-batch production, transient processes appear more and more frequently. Thus, the optimization problems of transient processes have gained increasing attention from both industry and academia. The requirement for wafer revisiting tend to complicate this problem significantly. However, only a few studies take such a challenge for cluster tools with wafer revisiting. This paper focuses on the schedule optimization of transient processes for dual-arm cluster tools with wafer revisiting. To accelerate transient processes, including both start-up and close-down ones, we adopt a program evaluation and review technique to analyze and harness a cluster tool’s state evolution. We then propose computationally efficient algorithms to speed up transient processes. Finally, we provide illustrative examples to show their applications and validate their effectiveness.https://ieeexplore.ieee.org/document/9389780/Cluster toolsemiconductor manufacturingwafer fabricationschedulingtransient processwafer revisiting |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Jipeng Wang Hesuan Hu Chunrong Pan Liang Li |
spellingShingle |
Jipeng Wang Hesuan Hu Chunrong Pan Liang Li Transient Process Optimization for Dual-Arm Cluster Tools With Wafer Revisiting IEEE Access Cluster tool semiconductor manufacturing wafer fabrication scheduling transient process wafer revisiting |
author_facet |
Jipeng Wang Hesuan Hu Chunrong Pan Liang Li |
author_sort |
Jipeng Wang |
title |
Transient Process Optimization for Dual-Arm Cluster Tools With Wafer Revisiting |
title_short |
Transient Process Optimization for Dual-Arm Cluster Tools With Wafer Revisiting |
title_full |
Transient Process Optimization for Dual-Arm Cluster Tools With Wafer Revisiting |
title_fullStr |
Transient Process Optimization for Dual-Arm Cluster Tools With Wafer Revisiting |
title_full_unstemmed |
Transient Process Optimization for Dual-Arm Cluster Tools With Wafer Revisiting |
title_sort |
transient process optimization for dual-arm cluster tools with wafer revisiting |
publisher |
IEEE |
series |
IEEE Access |
issn |
2169-3536 |
publishDate |
2021-01-01 |
description |
In wafer fabrication, it is imperative to minimize the transient process of cluster tools for the sake of on-demand and preventive maintenance. Due to the trend of multi-type and small-batch production, transient processes appear more and more frequently. Thus, the optimization problems of transient processes have gained increasing attention from both industry and academia. The requirement for wafer revisiting tend to complicate this problem significantly. However, only a few studies take such a challenge for cluster tools with wafer revisiting. This paper focuses on the schedule optimization of transient processes for dual-arm cluster tools with wafer revisiting. To accelerate transient processes, including both start-up and close-down ones, we adopt a program evaluation and review technique to analyze and harness a cluster tool’s state evolution. We then propose computationally efficient algorithms to speed up transient processes. Finally, we provide illustrative examples to show their applications and validate their effectiveness. |
topic |
Cluster tool semiconductor manufacturing wafer fabrication scheduling transient process wafer revisiting |
url |
https://ieeexplore.ieee.org/document/9389780/ |
work_keys_str_mv |
AT jipengwang transientprocessoptimizationfordualarmclustertoolswithwaferrevisiting AT hesuanhu transientprocessoptimizationfordualarmclustertoolswithwaferrevisiting AT chunrongpan transientprocessoptimizationfordualarmclustertoolswithwaferrevisiting AT liangli transientprocessoptimizationfordualarmclustertoolswithwaferrevisiting |
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1721539190346219520 |