Omnidirectional investigation of two-dimensional periodic nanostructure arrays by a two-axis Lloyd’s mirror interferometer
Two-dimensional periodic patterns with various periods and shapes were investigated via a novel two-axis Lloyd’s mirror interferometer, which allows the two mirrors to rotate independently. We created a theoretical model to reveal the relationships of all parameters in the system configuration and c...
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doaj-987af4adcefc4a1f85ad318ca08ade302020-11-25T02:50:03ZengElsevierResults in Physics2211-37972020-09-0118103225Omnidirectional investigation of two-dimensional periodic nanostructure arrays by a two-axis Lloyd’s mirror interferometerHaitao Jiang0Zhe Zhuang1Xiong Zhang2Cheng Li3Hu Chen4Aijie Fan5Shuai Chen6Xuguang Luo7Yiping Cui8Advanced Photonics Center, Southeast University, Nanjing 210096, Jiangsu, ChinaCorresponding authors at: Advanced Photonics Center, Southeast University, Nanjing 210096, Jiangsu, China.; Advanced Photonics Center, Southeast University, Nanjing 210096, Jiangsu, ChinaCorresponding authors at: Advanced Photonics Center, Southeast University, Nanjing 210096, Jiangsu, China.; Advanced Photonics Center, Southeast University, Nanjing 210096, Jiangsu, ChinaAdvanced Photonics Center, Southeast University, Nanjing 210096, Jiangsu, ChinaAdvanced Photonics Center, Southeast University, Nanjing 210096, Jiangsu, ChinaAdvanced Photonics Center, Southeast University, Nanjing 210096, Jiangsu, ChinaAdvanced Photonics Center, Southeast University, Nanjing 210096, Jiangsu, ChinaAdvanced Photonics Center, Southeast University, Nanjing 210096, Jiangsu, ChinaAdvanced Photonics Center, Southeast University, Nanjing 210096, Jiangsu, ChinaTwo-dimensional periodic patterns with various periods and shapes were investigated via a novel two-axis Lloyd’s mirror interferometer, which allows the two mirrors to rotate independently. We created a theoretical model to reveal the relationships of all parameters in the system configuration and corresponding periodic arrays including the shapes of each nanostructure pattern by the polarization modulation. The wafer-level non-uniformity of the periodic arrays depends on the size of the expanded laser beams. Finally, we developed software with a friendly user interface to provide easy access to the theoretical model that configures the system and designs nanostructure arrays.http://www.sciencedirect.com/science/article/pii/S2211379720316922Lloyd’s interferometerThree-beam interferencePolarization modulation2D dot/hole arrays |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Haitao Jiang Zhe Zhuang Xiong Zhang Cheng Li Hu Chen Aijie Fan Shuai Chen Xuguang Luo Yiping Cui |
spellingShingle |
Haitao Jiang Zhe Zhuang Xiong Zhang Cheng Li Hu Chen Aijie Fan Shuai Chen Xuguang Luo Yiping Cui Omnidirectional investigation of two-dimensional periodic nanostructure arrays by a two-axis Lloyd’s mirror interferometer Results in Physics Lloyd’s interferometer Three-beam interference Polarization modulation 2D dot/hole arrays |
author_facet |
Haitao Jiang Zhe Zhuang Xiong Zhang Cheng Li Hu Chen Aijie Fan Shuai Chen Xuguang Luo Yiping Cui |
author_sort |
Haitao Jiang |
title |
Omnidirectional investigation of two-dimensional periodic nanostructure arrays by a two-axis Lloyd’s mirror interferometer |
title_short |
Omnidirectional investigation of two-dimensional periodic nanostructure arrays by a two-axis Lloyd’s mirror interferometer |
title_full |
Omnidirectional investigation of two-dimensional periodic nanostructure arrays by a two-axis Lloyd’s mirror interferometer |
title_fullStr |
Omnidirectional investigation of two-dimensional periodic nanostructure arrays by a two-axis Lloyd’s mirror interferometer |
title_full_unstemmed |
Omnidirectional investigation of two-dimensional periodic nanostructure arrays by a two-axis Lloyd’s mirror interferometer |
title_sort |
omnidirectional investigation of two-dimensional periodic nanostructure arrays by a two-axis lloyd’s mirror interferometer |
publisher |
Elsevier |
series |
Results in Physics |
issn |
2211-3797 |
publishDate |
2020-09-01 |
description |
Two-dimensional periodic patterns with various periods and shapes were investigated via a novel two-axis Lloyd’s mirror interferometer, which allows the two mirrors to rotate independently. We created a theoretical model to reveal the relationships of all parameters in the system configuration and corresponding periodic arrays including the shapes of each nanostructure pattern by the polarization modulation. The wafer-level non-uniformity of the periodic arrays depends on the size of the expanded laser beams. Finally, we developed software with a friendly user interface to provide easy access to the theoretical model that configures the system and designs nanostructure arrays. |
topic |
Lloyd’s interferometer Three-beam interference Polarization modulation 2D dot/hole arrays |
url |
http://www.sciencedirect.com/science/article/pii/S2211379720316922 |
work_keys_str_mv |
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